Preparation method of tantalum-doped vanadium dioxide film
A technology of vanadium dioxide and vanadium pentoxide is applied in directions such as vanadium oxide to achieve the effects of reducing phase transition temperature, simple preparation method and improving visible light transmittance
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Embodiment 1
[0036] 1) Weigh 2.275g of vanadium pentoxide, 4.7275g of oxalic acid dihydrate and 50ml of absolute ethanol in a 250ml round-bottomed flask, connect a condenser tube to the round-bottomed flask and place it in an oil bath at 120°C for reflux reaction for 10 hours, after natural cooling A clear and transparent green vanadium precursor solution was obtained;
[0037] 2) Take 3ml of the above vanadium precursor solution and add 4 μl of tantalum ethoxide, stir and ultrasonically evenly, the molar ratio of tantalum to vanadium in the obtained tantalum-doped precursor solution is 1%;
[0038] 3) Coating the above solution by spin coating, take 150 μl precursor solution and evenly drop it on the cleaned quartz glass substrate, the first step is 500r / min for 5s, the second step is 3000r / min for 25s, and the film is placed on the heating table Dry at 80°C for 20 minutes;
[0039] 4) Place the dried film in a tube furnace, evacuate to 700mtorr, heat up to 550°C at 10°C / min, and keep it...
Embodiment 2
[0041] The difference between Example 2 and Example 1 is that the amount of tantalum ethoxide added is 16.2 μl, and the molar ratio of tantalum to vanadium in the obtained tantalum-doped precursor solution is 4%.
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