Method for improving diamond coating deposition efficiency of hot filament CVD (chemical vapor deposition) based on magnetic confinement

Abstract

The invention belongs to the technical field of diamond coating preparation, and particularly discloses a method for improving the diamond coating deposition efficiency of hot filament CVD (chemical vapor deposition) based on magnetic confinement. Improved hot wire CVD equipment comprises a gas source, a coating chamber and a vacuum pump which are connected in sequence, wherein a base table and hot filament electrode assemblies are arranged in the coating chamber, and magnetic enhancement assemblies are arranged in the coating chamber. Each magnetic enhancement assembly comprises magnetic enhancement electrodes and a shared magnetic control power supply, and a spiral hot filament is connected between the magnetic enhancement electrodes. In the dissociation stage, the magnetic control power supply is controlled to introduce 0.3-0.5 A alternating current into the magnetic enhancement electrodes; in the deposition stage, the magnetic control power supply is controlled to introduce 3-5A alternating current into the magnetic enhancement electrodes; and in the cooling stage, the magnetic control power supply is controlled to supply 1-3A alternating current to the magnetic enhancement electrodes. By the adoption of the scheme, charged particle clusters do spiral motion under the action of the magnetic field, the residence time of particles is prolonged, the effective collision probability between the particles and the to-be-coated tool is increased, and then the deposition rate is increased.

Description

technical field [0001] The invention belongs to the technical field of diamond coating preparation, and in particular relates to a method for improving the efficiency of hot wire CVD deposition diamond coating based on magnetic confinement. Background technique [0002] The commonly used preparation methods of diamond coatings include hot wire method, explosion method, microwave method, etc. Among them, the hot wire method can deposit a homogeneous thin film on a substrate with complex shapes, and is currently the mainstream method for preparing diamond coatings on the surface of tools. The hot wire method mainly fills the reaction chamber with C-containing gas, such as low-concentration methane, ethanol, acetone, etc., and hydrogen in a certain proportion, and is cracked under the action of high-temperature hot wire to form free C-containing groups, which move to the surface of the tool for further processing. deposition. At the same time, C atoms in the diamond phase are ...

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Problems solved by technology

[0005] Aiming at the deficiencies in the prior art, the present invention provides a method for improving the efficiency of hot-wire CVD deposition of diamond coatings based on magnetic confinement, so as to solve the problems of slow deposition rate and gas utilization rate caused by insufficient reaction gas dissociation in the current hot-wire method. low level problem

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