Broadband wide-angle anti-reflection composite micro-nano structure surface and preparation method thereof

Abstract

The invention discloses a broadband wide-angle composite micro-nano structure anti-reflection surface, belongs to the technical field of optical technology and micro-nano machining, and aims to overcome the defects that in the bionic moth eye micro-nano structure surface technology, the structure height and the depth-to-width ratio restrict the micro-nano machining technology, and in the optical anti-reflection film technology, the anti-reflection performance is limited by the incident angle. A single-layer thin film is formed on the surface of an optical material substrate, a moth eye micro-nano structure with a certain depth is formed on a thin film layer, a residual film layer is reserved, and is composed of three basic structures which sequentially comprise a micro-nano structure layer, a middle residual layer and a substrate layer. The micro-nano structure layer is composed of a micro-nano structure unit array, and the cycle of the micro-nano structure unit meets the sub-wavelength transmission requirement under the condition of the designed incident angle, namely, lambda min represents the minimum incident wavelength, nsub represents the refractive index of the substrate, n0 represents the refractive index of air, theta max represents the maximum incident angle, and p represents the cycle of the micro-nano structure unit. According to the invention, the imaging quality is not influenced while the high transmittance is ensured.

Description

technical field [0001] The invention relates to an anti-reflection composite micro-nano structure surface with wide bandwidth and angle and a preparation method thereof, belonging to the technical fields of optical technology and micro-nano processing. Background technique [0002] Anti-optical reflection performance is an important interface feature to improve the energy utilization rate of optical components and reduce stray light. The commonly used anti-reflection window is coated with a single layer or multiple layers of dielectric films with different refractive indices on the surface of the substrate, and the light is reflected multiple times in the film, resulting in interference phenomenon. When the wavelength of the incident light, the thickness of the film and the refractive index of the film meet the conditions of destructive interference, the transmittance of light energy is the largest, achieving the purpose of anti-reflection. Traditional anti-reflection optic...

AI Technical Summary

Problems solved by technology

The moth-eye micro-nano structure can achieve the ideal broadband anti-reflection effect, but as the angle requirements increase, such as 70-80°, even the transmittance of the moth-eye structure will drop significantly, and it cannot maintain a good anti-reflection effect effect

To maintain a large-angle transmittance of 70-80°, it is necessary to increase the structural height and aspect ratio of the moth-eye micro-nano structure, which poses a severe challenge to the micro-nano processing technology

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