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Device for effectively reducing volatilization of ammonium hydroxide in SC1 and operation method

A technology of ammonia water and water-cooled tubes, which is applied in the directions of packaging, transportation and packaging, tankers, etc., to achieve the effect of prolonging the storage time

Pending Publication Date: 2021-12-28
杭州中欣晶圆半导体股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a device and operation method for effectively reducing ammonia volatilization in SC1, which can solve existing problems

Method used

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  • Device for effectively reducing volatilization of ammonium hydroxide in SC1 and operation method
  • Device for effectively reducing volatilization of ammonium hydroxide in SC1 and operation method
  • Device for effectively reducing volatilization of ammonium hydroxide in SC1 and operation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] A second chuck 9 is fixedly installed on the outer surface of one end of the outer cylinder body 8, and a first chuck 7 is fixedly installed on the outer surface of the other end of the outer cylinder body 8. Utilizing the setting of the first chuck 7 and the second chuck 9, The two ends of the outer cylinder 8 are sealed and fixed, and at the same time, the installation operation between the outer cylinder 8 and the inner cylinder 6 is convenient. The outer cylinder 8 and the inner cylinder 6 are used to form a double-layer heat insulation structure, which can effectively reduce the Ammonia volatilization rate.

[0039] One side of the second chuck 9 is provided with a connecting pipe 10, and the lower end of the connecting pipe 10 is equipped with a circulating water tank 11, and one end of the water-cooled pipe 13 is connected with the connecting pipe 10 through a branch pipe, and the circulating water tank 11 can be used. The pipe 10 cooperates with the branch pipe ...

Embodiment 2

[0043] A compressor 1 is installed at the lower end of the cooling pipe 22 , and the compressor 1 is used to inject refrigerant into the cooling pipe 22 , so as to cool the SC1 liquid in the inner cylinder 6 through the cooling pipe 22 .

[0044] One end of the hydraulic rod 5 is provided with a second roller 17, the hydraulic rod 5 and the balance plate 3 are flexibly connected by the second roller 17, the other end of the hydraulic rod 5 is provided with a first roller 16, the hydraulic rod 5 and the fixed The bottom plates 2 are movably connected by the first roller 16, and the use angle of the hydraulic rod 5 can be flexibly adjusted by using the setting of the first roller 16 and the second roller 17, so that the fixed bottom plate 2 and the balance plate 3 can be Balance adjustment operation.

[0045] There is a liquid discharge groove on the suction pipe 21, and a docking chuck 18 is fixedly installed on the outer surface of the discharge pipe 12. By pulling the suction...

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Abstract

The invention discloses a device for effectively reducing volatilization of ammonium hydroxide in SC1 and an operation method. The device comprises a drying cabinet and an outer cylinder body; the outer cylinder body is fixedly installed on the outer surface of one side of the drying cabinet, a communicating pipe is arranged between the outer cylinder body and the drying cabinet, and an exhaust hood is fixedly installed on the outer surface of the upper end of the drying cabinet; and push-and-pull buckles are movably installed on the outer surfaces of the side edges of the exhaust hood and the outer cylinder body correspondingly, and a movable sliding frame is fixedly installed at one end of each push-and-pull buckle. The contact face of an inner cylinder body is increased through a heat dissipation clamping ring, water circularly flows in the heat dissipation clamping ring and a water cooling pipe, the water absorbing heat flows into a circulating water tank again through a circulating pipe, and the water in the circulating water tank can be reused after heat dissipation is conducted on the water in the circulating water tank through a draught fan; and by means of the arrangement of the outer cylinder body and the water cooling pipe, the temperature of the SC1 liquid in the device can be effectively reduced, so that the ammonium hydroxide in the SC1 liquid is kept in a normal-temperature state, the phenomenon of accelerated volatilization of the ammonium hydroxide is avoided, and the preservation time of the ammonium hydroxide is prolonged.

Description

technical field [0001] The invention belongs to the technical field of ammonia water storage, and more specifically relates to a device for effectively reducing the volatilization of ammonia water in SC1. Background technique [0002] Commonly used cleaning solutions for integrated circuit boards have two specifications, SC1 and SC2. The SC1 cleaning solution is composed of ammonia, hydrogen peroxide and water, while the SC2 cleaning solution is composed of hydrochloric acid, hydrogen peroxide and water. Both cleaning solutions are effective on integrated circuit boards. to the cleaning effect. [0003] The invention patent with the patent number CN109625669A discloses an ammonia water storage device, which belongs to the field of ammonia water storage. The ammonia water storage device comprises: an ammonia water storage tank, an ammonia mist absorber communicated with the top of the ammonia water storage tank through a first pipeline; the top and the bottom of the ammonia ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65D88/74B65D90/12B65D88/54
CPCB65D88/744B65D90/12B65D88/54
Inventor 宣丽英
Owner 杭州中欣晶圆半导体股份有限公司
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