Diamond film processing method and device
A diamond film and processing method technology, applied in metal material coating process, gaseous chemical plating, coating and other directions, can solve the problems of difficulty in ensuring the processing quality of diamond film, diamond film processing, difficult-to-shape workpieces or large-sized workpieces, etc. , to ensure the quality of production, improve thickness uniformity, and improve the effect of uniform heating
Pending Publication Date: 2022-01-11
久钻科技(成都)有限公司
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Problems solved by technology
[0004] The technical problem to be solved and the technical task proposed by the present invention are to improve the existing technology and provide a diamond film processing method to solve the problem that it is difficult to process diamond film on special-shaped workpieces or large-size workpieces in the current technology, and it is difficult to guarantee diamond film processing. quality problem
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[0031] Next, the technical solutions in the embodiments of the present invention will be described in connection with the drawings of the embodiments of the present invention, and it is understood that the described embodiments are merely the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art are in the range of the present invention without making creative labor premise.
[0032] Example discloses a diamond thin film processing method and apparatus according to the present invention, embodiments convenient, efficient, can effectively protect the processing quality in the shaped workpiece or a large-sized workpiece diamond thin film, improve the processing uniformity of the diamond thin film, diamond film and the substrate Binding force.
[0033] One kind of diamond thin film processing method, comprising the step of:
[0034] Pretreatment of the w...
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The invention discloses a diamond film processing method and device. Hot wires parallel to each other are arranged at two transverse sides of a workpiece, the hot wires are used for heating so as to deposit and process a diamond film in a to-be-processed area of the workpiece, in the deposition processing process, the workpiece rotates in the vertical direction, the hot wires reciprocate along the height direction or the workpiece reciprocates along the height direction. The heat generated by the hot wires can uniformly cover the to-be-processed area of the workpiece, so that the heating uniformity of the workpiece is improved, each part of the to-be-processed area of the workpiece can be uniformly heated by the hot wires, the generation quality of the diamond film is guaranteed, the thickness uniformity of the film and the binding force of the film and a substrate are improved, the diamond film with high wear resistance can be prepared on the surface of the special-shaped workpiece or the large-size workpiece, and the service life of the workpiece is greatly prolonged.
Description
Technical field [0001] The present invention relates to diamond coated machining technical field, particularly to a diamond thin film processing method and apparatus. Background technique [0002] Surface treatment technology refers to the use of special process for surface preparing a special chemical in the matrix, mechanical, protective coating electrical, thermal, optical properties, can significantly improve product quality, to achieve the material surface composite, to solve the problem of a single material can not be resolved, thereby increasing the life of the product, enhanced surface wear resistance of products to enhance product corrosion resistance, and enhance market competitiveness of products. A surface treatment technique wherein a chemical vapor deposition a diamond coating process, which is by heating, various plasma excitation energy or light radiation, the gaseous or vapor state within the device on a solid chemical to form a layer interface reacted coated wit...
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IPC IPC(8): C23C16/27C23C16/44C23C16/458
CPCC23C16/271C23C16/44C23C16/458
Inventor 曾祥才姚毅马骏罗鑫
Owner 久钻科技(成都)有限公司