Omni-directional dynamic heat source type uniaxial micro-mechanical accelerometer and processing method thereof

Abstract

The invention discloses an omni-directional dynamic heat source type uniaxial micro-mechanical accelerometer and a processing method thereof. The accelerometer comprises a sensitive layer, a substrate layer and a cover plate, the sensitive layer comprises a middle heating cavity and a middle detection cavity, and the upper surface of the sensitive layer is provided with an omni-directional oscillator heater and a pair of thermistors; the omni-directional dynamic heat source pendulum heater is suspended at the central position of the sensitive layer through eight completely symmetrical semicircular supporting beams; the heater and the thermistor are electrified in a constant current mode; and a groove is etched on the cover plate and is hermetically connected with the upper surface of the sensitive layer. Measurement of uniaxial acceleration can be realized, the input acceleration on the X axis can be sensed, the measurement range is large, and the impact resistance is high. The accelerometer inherits the advantages of an MEMS sensor, has the advantages of being small in size, light in weight, low in cost and the like, and conforms to the development direction of the sensor towards microminiaturization, integration and intelligence. Meanwhile, the accelerometer has the advantages of simple structure and processing technology, large measuring range, high reliability and the like.

Description

technical field [0001] The invention relates to the technical field of detecting the acceleration and attitude parameters of a moving carrier by utilizing the pendulum of an omnidirectional dynamic heat source to swing under the action of linear acceleration, in particular to a single-axis micro-mechanical accelerometer and a processing method thereof of an omnidirectional dynamic heat source pendulum type, belonging to Inertial measurement field. Background technique [0002] Due to the application requirements of carrier attitude measurement in various fields such as civil vehicles, railway construction, industrial production, bridge construction, earthquake research, geodetic surveying and mapping, geological and mineral exploration, marine survey, satellite communication, robot engineering, etc., in recent years, sensor technology and The organic combination of emerging science and technology will make the attitude sensor develop towards the direction of miniature, compr...

AI Technical Summary

Problems solved by technology

Due to the small velocity of the thermal airflow, the asymmetric temperature field gradient caused by the deflection of the airflow is very small, so the unbalanced voltage output by the Wheatstone bridge composed of the thermistor is small, and the sensitivity of the sensor is low

In the existing solutions, although the sensitivity can be improved by increasing the power of the heater, due to the limitation of power consumption, the sensitivity has not been substantially changed and improved, and it is difficult to break through this practical bottleneck

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