Omni-directional dynamic heat source type uniaxial micro-mechanical accelerometer and processing method thereof

An accelerometer, all-round technology, applied in the field of inertial measurement, which can solve the problems of power consumption limitation, low sensor sensitivity, small unbalanced voltage, etc.

Inactive Publication Date: 2022-02-01
朴然
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Problems solved by technology

Due to the small velocity of the thermal airflow, the asymmetric temperature field gradient caused by the deflection of the airflow is very small, so the unbalanced voltage output by the Wheatstone bridge composed of the thermistor is small, and the sensitivity of the sensor is l

Method used

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  • Omni-directional dynamic heat source type uniaxial micro-mechanical accelerometer and processing method thereof
  • Omni-directional dynamic heat source type uniaxial micro-mechanical accelerometer and processing method thereof
  • Omni-directional dynamic heat source type uniaxial micro-mechanical accelerometer and processing method thereof

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[0041] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0042] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, ...

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Abstract

The invention discloses an omni-directional dynamic heat source type uniaxial micro-mechanical accelerometer and a processing method thereof. The accelerometer comprises a sensitive layer, a substrate layer and a cover plate, the sensitive layer comprises a middle heating cavity and a middle detection cavity, and the upper surface of the sensitive layer is provided with an omni-directional oscillator heater and a pair of thermistors; the omni-directional dynamic heat source pendulum heater is suspended at the central position of the sensitive layer through eight completely symmetrical semicircular supporting beams; the heater and the thermistor are electrified in a constant current mode; and a groove is etched on the cover plate and is hermetically connected with the upper surface of the sensitive layer. Measurement of uniaxial acceleration can be realized, the input acceleration on the X axis can be sensed, the measurement range is large, and the impact resistance is high. The accelerometer inherits the advantages of an MEMS sensor, has the advantages of being small in size, light in weight, low in cost and the like, and conforms to the development direction of the sensor towards microminiaturization, integration and intelligence. Meanwhile, the accelerometer has the advantages of simple structure and processing technology, large measuring range, high reliability and the like.

Description

technical field [0001] The invention relates to the technical field of detecting the acceleration and attitude parameters of a moving carrier by utilizing the pendulum of an omnidirectional dynamic heat source to swing under the action of linear acceleration, in particular to a single-axis micro-mechanical accelerometer and a processing method thereof of an omnidirectional dynamic heat source pendulum type, belonging to Inertial measurement field. Background technique [0002] Due to the application requirements of carrier attitude measurement in various fields such as civil vehicles, railway construction, industrial production, bridge construction, earthquake research, geodetic surveying and mapping, geological and mineral exploration, marine survey, satellite communication, robot engineering, etc., in recent years, sensor technology and The organic combination of emerging science and technology will make the attitude sensor develop towards the direction of miniature, compr...

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Application Information

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IPC IPC(8): G01P15/12
CPCG01P15/12
Inventor 朴然
Owner 朴然
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