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Systems and methods for simultaneous phase contrast imaging and electron energy loss spectroscopy

An imaging system and spectrum technology, applied in the direction of circuits, discharge tubes, electrical components, etc.

Pending Publication Date: 2022-03-01
FEI CO
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

With existing / current detector configurations, neither DPC-STEM nor iDPC-STEM can be performed with EELS because segmented DPC / iDPC detectors block the electrons needed to detect and interpret EELS datasets.

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  • Systems and methods for simultaneous phase contrast imaging and electron energy loss spectroscopy
  • Systems and methods for simultaneous phase contrast imaging and electron energy loss spectroscopy
  • Systems and methods for simultaneous phase contrast imaging and electron energy loss spectroscopy

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Embodiment Construction

[0024] The following description refers to systems for imaging using charged particles, such as figure 1 A system and method for simultaneously acquiring structural and compositional / bonding information of a sample is the charged particle imaging system shown in . Structural information can be obtained by phase contrast imaging such as differential phase contrast (DPC) scanning transmission electron microscopy (STEM) imaging or integrated differential phase contrast imaging via a first detector positioned downstream of the sample. degree (iDPC) STEM imaging. Composition, bonding or electronic structure information can be obtained by electron energy loss spectroscopy (EELS) via a second detector positioned downstream of the first detector. A spectrometer is positioned between the first detector and the second detector to spatially disperse the charged particles based on particle energy. The first detector is centered on the main axis of the charged particle beam. In response...

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Abstract

Systems and methods for simultaneous phase contrast imaging and electron energy loss spectroscopy. Methods and systems for imaging a sample with charged particles include directing charged particles along a principal axis toward the sample, and simultaneously detecting first and second portions of the charged particles transmitted through the sample with first and second detectors, respectively. The second detector is positioned downstream of the first detector. Each of the transmitted charged particles exits the sample at an exit angle between a direction of the transmitted charged particles and the principal axis. The exit angle of the first portion of the transmissive charged particles overlaps the exit angle of the second portion of the transmissive charged particles. In this way, complementary information, such as structural and composition information, can be obtained simultaneously.

Description

technical field [0001] The present description generally relates to methods and systems for imaging a sample using a charged particle system, and more particularly to simultaneously performing phase contrast imaging and energy loss spectroscopy on a sample using a charged particle system. Background technique [0002] Electron energy loss spectroscopy (EELS) can reveal compositional information by measuring the energy loss of electrons passing through thin samples. In EELS, electrons transmitted through a sample are spatially dispersed by a spectrometer based on the energy of the electrons and collected as a spectrum by a detector downstream of the spectrometer. EELS can be performed simultaneously with dark-field transmission electron microscopy (TEM). The TEM signal can be acquired using a High Angle Annular Dark Field (HAADF) detector positioned between the sample and the spectrometer. By scanning a focused electron beam over the sample, a scanning transmission electron...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q30/02
CPCG01Q30/02H01J37/244H01J2237/24455H01J2237/24485H01J2237/2802H01J2237/24475H01J2237/2614H01J37/28H01J37/145H01J37/20
Inventor I·拉吉克S·维斯普奇E·G·博世B·H·弗雷塔
Owner FEI CO