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Etchant composition for display panel and etching method of display panel

A display panel and composition technology, applied in the direction of surface etching composition, chemical instrument and method, electric solid device, etc., can solve the problems of high process cost, increased process time and complexity, expensive photomask, etc., to achieve The effect of reducing process time, optimizing process, and reducing process cost

Inactive Publication Date: 2022-03-11
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the manufacturing process of TFT matrix substrates, it is necessary to use multiple photomasks and a suitable etching process for the photolithography process (Photo-lithography). However, photomasks are quite expensive, and the more photomasks the TFT process requires The higher the process cost, and increase the process time and complexity

Method used

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  • Etchant composition for display panel and etching method of display panel
  • Etchant composition for display panel and etching method of display panel
  • Etchant composition for display panel and etching method of display panel

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-12

[0054] In the following examples, the basic solution is composed of the following raw materials in weight percentage: 10% hydrogen peroxide, 0.2% hydroxybenzotriazole (etching inhibitor), 4% citric acid and 1% malonic acid (etching additive ), 0.2% sulfuric acid (pH regulator), and according to the following table 1, different contents of fluoride and water in different amounts were added to the above-mentioned basic solution to prepare the etching solution compositions of Examples 1-12 of the present disclosure.

[0055] Table 1

[0056]

[0057] Next, using the etching solution compositions shown in the foregoing Examples 1-12 at a temperature of 32° C. to etch the test object including the copper-molybdenum laminated electrode layer and the silicon-containing non-metallic layer for 130 seconds, observe the Table 2 shows the etching results of the electrode layer including the copper-molybdenum stack and the silicon-containing metal layer.

[0058] Table 2

[0059]

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Abstract

The invention provides an etchant composition for a display panel and an etching method of the display panel. The etching agent composition for the display panel is characterized by comprising the following raw materials in percentage by weight: 5%-15% of hydrogen peroxide, 0.1%-1% of an etching inhibitor, 2%-10% of an etching additive, 1%-5% of a pH value regulator, 0.01%-1.0% of fluoride and the balance of an aqueous medium, the etchant composition can be used to simultaneously etch a metal layer within a display panel and a silicon-containing non-metal layer adjacent to the metal layer.

Description

technical field [0001] The present disclosure relates to the field of display technology, in particular to an etchant composition for a display panel and an etching method for a display panel. Background technique [0002] Displays such as Organic Light-Emitting Diode Displays (OLEDs) and Liquid Crystal Displays (LCDs) have been widely used in various electronic products such as personal computers, LCD TVs, or mobile phones. In recent years, while people's demand for displays has been increasing, higher requirements have been put forward for the image quality and manufacturing cost of the displays. [0003] Display panels in liquid crystal displays and organic light emitting diode displays usually include thin film transistor (ThinFilm Transistor, TFT) matrix substrates. A plurality of scanning lines parallel to each other, a plurality of data lines parallel to each other, a plurality of thin film transistors and pixel electrodes are arranged on the TFT matrix substrate, wh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K13/08C23F1/02C23F1/18C23F1/26H01L21/77H01L27/12
CPCC09K13/08C23F1/18C23F1/26C23F1/02H01L27/1259H01L27/1214
Inventor 何毅烽
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD