Formaldehyde MEMS gas sensor based on PdRh-loaded SnO2 multi-shell structure and preparation method thereof
A gas sensor and shell structure technology, applied in the direction of material resistance, etc., can solve the problems of time-consuming and laborious, high professional knowledge and literacy requirements, expensive experimental equipment, real-time analysis, etc., to improve response, increase reaction speed and sensitivity, gas Good consistency of sensitive performance
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[0020] see Figure 1-5 , the present invention provides a PdRh-based load SnO 2 The formaldehyde MEMS gas sensor of multi-shell structure and preparation method thereof, comprises the following steps:
[0021] S1: Prepare carbon sphere template by hydrothermal method, prepare 60mL of 0.1-0.3M sucrose solution and put it in a 100mL reactor, conduct a hydrothermal reaction at 150-200°C for 8-12h, cool naturally to room temperature, collect the dark brown product in the reactor, Alternately wash with deionized water and ethanol for 3 to 5 times, and dry in a constant temperature drying oven at 60 to 90°C for 8 to 12 hours for later use;
[0022] S2: Preparation of SnO by Hard Template Method 2 Multi-shell hollow spheres, first prepare 30mL tin tetrachloride hydrate (SnCl 4 ·5H 2 (0) solution, add 0.6 ~ 1.5g carbon spheres, after ultrasonic dispersion for 15 ~ 30min, continue magnetic stirring for 4 ~ 8h, then vacuum filter, wash with deionized water for 3 ~ 5 times, dry at 60...
Embodiment 1
[0026] Carbon nanospheres were prepared by hydrothermal method, 0.3M sucrose solution was dissolved in 60mL deionized water to obtain a transparent solution, which was then transferred to a 100mL polytetrafluoroethylene-lined stainless steel reactor, and the reactor was placed at 200 °C The hydrothermal reaction was performed in an electric oven for 12 hours, and cooled naturally to room temperature; the dark brown product was collected by centrifugation, washed with deionized ethanol and deionized water, and then dried overnight at 90°C to obtain a carbon sphere template.
[0027] Preparation of SnO by Hard Template Method 2 Multi-shell hollow spheres, first prepare 30mL of 1.5M tin tetrachloride hydrate (SnCl 4 ·5H 2 O) solution, add 1.5g carbon spheres, ultrasonically disperse for 30min, continue magnetic stirring for 8h, vacuum filter, wash with deionized water 5 times, dry at 90°C for 12h, and finally dry the sample at a rate of 10°C / min Raise the temperature to 500°C, ...
Embodiment 2
[0032] Carbon nanospheres were prepared by hydrothermal method, 0.1M sucrose solution was dissolved in 60mL deionized water to obtain a transparent solution, which was then transferred to a 100mL polytetrafluoroethylene-lined stainless steel reactor, and the reactor was placed at 150°C The hydrothermal reaction was carried out in an electric oven for 8 hours, and cooled naturally to room temperature; the dark brown product was collected by centrifugation, washed with deionized ethanol and deionized water, and then dried at 60°C overnight to obtain a carbon sphere template.
[0033] Preparation of SnO by Hard Template Method 2 Multi-shell hollow spheres, first prepare 30mL of 2.0M tin tetrachloride hydrate (SnCl 4 ·5H 2 O) solution, add 0.6g carbon spheres, ultrasonically disperse for 15min, continue magnetic stirring for 4h, vacuum filter, wash with deionized water 3 times, dry at 60°C for 8h, and finally dry the sample at a rate of 1°C / min Raise the temperature to 500°C, ke...
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