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Microwave plasma torch device with double microwave resonant cavities and use method of microwave plasma torch device

A microwave plasma and microwave resonant cavity technology, applied in the field of analysis, can solve the problems of low microwave-plasma coupling efficiency, large volume of MPT electromagnetic shielding cover, reducing microwave radiation, etc., and achieves wide applicable power range, strong excitation ability, Reduce the effect of microwave radiation

Pending Publication Date: 2022-03-15
HUZHOU INST OF ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] Aiming at the problems that the existing MPT electromagnetic shield has a large volume, low microwave-to-plasma coupling efficiency, and the Beenakker resonant cavity has poor tolerance to samples such as molecular gases, organic solvents, and air, the present invention proposes a dual-microwave resonant cavity microwave plasma torch device, which has a resonant cavity structure with double electromagnetic wave modes, combined with the advantages of MPT and Beenakker resonant cavity, improves microwave energy utilization efficiency and plasma excitation ability, reduces microwave radiation, and avoids microwave coupling Part of the destruction of the axisymmetric electromagnetic field distribution reduces the disturbance of the ambient gas to the plasma, the applicable power range is wide, and it can work in the range of low pressure to normal pressure

Method used

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  • Microwave plasma torch device with double microwave resonant cavities and use method of microwave plasma torch device
  • Microwave plasma torch device with double microwave resonant cavities and use method of microwave plasma torch device
  • Microwave plasma torch device with double microwave resonant cavities and use method of microwave plasma torch device

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specific Embodiment 1

[0039] Specific embodiment 1 provides the microwave plasma torch device of the patent of the present invention, and combines figure 1 A schematic diagram of a typical structure is given.

[0040] The microwave plasma torch device is composed of a cavity part, a microwave coupling part and a tuning part;

[0041] The cavity part includes a resonant cavity 1 and a resonant cavity 2 placed coaxially, and the resonant cavity 2 is placed on the resonant cavity 1;

[0042] Resonant cavity 1 is a three-tube coaxial resonant cavity structure with one end open, the outer tube and the middle tube are made of metal, and the microwave transmission mode between the outer tube and the middle tube is TEM mode; the material of the inner tube can be metal or It can be non-metal, and when it is metal, the microwave transmission mode between the middle tube and the inner tube is also TEM mode; the inner tube can also be a cylindrical structure. Gas can be introduced into the three pipes, prefe...

specific Embodiment 2

[0063] figure 2 Another structural schematic diagram according to the patent of the present invention is given.

[0064] The microwave plasma torch device is composed of a cavity part, a microwave coupling part and a tuning part;

[0065] The cavity part includes a resonant cavity 1 and a resonant cavity 2 placed coaxially, and the resonant cavity 2 is placed on the resonant cavity 1;

[0066] The resonant cavity-1 is composed of an outer tube 11, a middle tube 12, an inner tube 13, a porous concentric gasket 14, a coupling ring 15, a tangential inflow port 16, and a reflective end face 17;

[0067] The outer tube, the middle tube, and the inner tube are coaxially placed, and the upper end surfaces of the three tubes are flush with the upper surface of the second lower cover plate of the resonance cavity;

[0068] The porous concentric gasket 14 is made of metal, and the distance from the upper port of the middle tube is about 1 / 4 wavelength odd times, and forms an inner co...

specific Embodiment 3

[0074] image 3 Another structural schematic diagram according to the patent of the present invention is given.

[0075] The microwave plasma torch device is composed of a cavity part, a microwave coupling part and a tuning part;

[0076] and figure 2 The differences are:

[0077] The inner tube 13 is a solid cylindrical metal conductor;

[0078] The upper end surface of the middle pipe is higher than the upper end surface of the outer pipe, and the upper end surface of the inner pipe is higher than the upper end surface of the middle pipe;

[0079] The porous concentric gasket 14 is made of metal, and the distance from the upper port of the middle pipe is an odd multiple of 1 / 4 wavelength, forming an inner coaxial resonant cavity structure with the middle pipe and the inner pipe;

[0080] The resonant cavity two 2 is a reentrant TM 010 Resonant cavity structure, the lower surface of the upper cover plate is a flat-topped conical boss 21 with a hollow structure, and its ...

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Abstract

The invention discloses a microwave plasma torch device with double microwave resonant cavities and a use method of the microwave plasma torch device. The microwave plasma torch device comprises a cavity part, a microwave coupling part and a tuning part, the cavity part comprises a resonant cavity I and a resonant cavity II which are coaxially arranged, and the resonant cavity II is arranged above the resonant cavity I; the first resonant cavity is of a coaxial resonant cavity structure with one end open, the microwave transmission mode is a TEM mode, and the second resonant cavity is of a resonant cavity structure supporting a TM010 transmission mode. The microwave coupling part can couple microwave energy to the cavity part in the modes of conductive coupling, capacitive coupling, magnetic field coupling and the like. According to the invention, the microwave radiation is reduced, the microwave power and the excitation capability of the plasma are improved, the damage of the microwave coupling part to the axisymmetric electromagnetic field distribution of the cavity part is reduced, the disturbance of the environment gas to the plasma is reduced, the applicable power range is wide, and the device can work in a range from low pressure to normal pressure.

Description

technical field [0001] The invention belongs to the analytical technical fields of atomic spectrum, mass spectrometry, color-light coupling, etc., and specifically relates to a microwave plasma torch device with double microwave resonant cavities and a use method thereof. Background technique [0002] Microwave plasma torch (MPT), Beenakker resonator (including reentrant TM 010 Resonant cavities) are all devices that use microwaves to generate plasma, and the formed plasma can be used for elemental analysis. [0003] Among them, the microwave plasma torch (MPT) was invented by Professor Jin Qinhan in 1985, and the corresponding application patent number is CN94205428.8. The torch is a coaxial structure of three metal tubes with one end open. Microwave energy enters the torch through the coaxial cable in the form of capacitance and conductance coupling. The length of the cavity is an odd multiple of 1 / 4λ. The microwave forms a standing wave in the cavity. A plasma is formed...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/46
CPCH05H1/46
Inventor 于丙文金伟
Owner HUZHOU INST OF ZHEJIANG UNIV
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