Tactile sensor with high transparency and stretchable capacitance and preparation method of tactile sensor
A tactile sensor, a high-transparency technology, applied in the direction of using electric/magnetic devices to transmit sensing components, etc., can solve the problem that the tactile sensor cannot meet high transparency and stretchability at the same time, and achieve good application prospects, reliable performance, and stability The effect of conductivity
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Embodiment 1
[0045] Step (1) prepares silver nanofiber network structure:
[0046] In a grounded insulating environment, polyvinyl alcohol (PVA) solution is used to spin at a working voltage of 10KV, and the direction of the substrate is adjusted by 90° to spin again to obtain a nanofiber network. The obtained nanofiber network was subjected to steam treatment, and silver was deposited on the nanofiber network using magnetron sputtering at a power of 120 W to obtain a silver nanofiber network.
[0047] Step (2) to transfer the silver nanofiber network onto the polymer substrate:
[0048] Spin-coat polymethyl methacrylate (PMMA) at a speed of 3500r / min on a silicon wafer for 20s to obtain a PMMA layer, then bake on a hot plate at 200°C for 100s; Speed spin coating polyamic acid (PI) solution 50s, forms PI layer, and silicon chip, PMMA layer and PI layer three-layer structure integral body is wafer.
[0049] Place the silver nanofiber network obtained in step (1) on the PI layer of the w...
Embodiment 2
[0060] Step (1) prepares silver nanofiber network structure:
[0061] In a grounded insulating environment, polyvinyl alcohol (PVA) solution is used to spin at a working voltage of 15KV, and the direction of the substrate is adjusted by 90° to spin again to obtain a nanofiber network. The obtained nanofiber network was subjected to steam treatment, and silver was deposited on the nanofiber network using magnetron sputtering at a power of 100 W to obtain a silver nanofiber network.
[0062] Step (2) to transfer the silver nanofiber network onto the polymer substrate:
[0063] Spin-coat polymethyl methacrylate (PMMA) at a speed of 3000r / min on a silicon wafer for 30s to obtain a PMMA layer, then bake on a hot plate at 180°C for 120s; The polyamic acid (PI) solution was coated at a high speed for 60 seconds to form a PI layer, and the three-layer structure of the silicon wafer, the PMMA layer and the PI layer was taken as a wafer as a whole.
[0064] Place the silver nanofiber ...
Embodiment 3
[0075] Step (1) prepares silver nanofiber network structure:
[0076] In a grounded insulating environment, polyvinyl alcohol (PVA) solution is used to spin at a working voltage of 20KV, and the direction of the substrate is adjusted by 90° to spin again to obtain a nanofiber network. The obtained nanofiber network was steam-treated, and silver was deposited on the nanofiber network using magnetron sputtering at a power of 80 W to obtain a silver nanofiber network.
[0077] Step (2) to transfer the silver nanofiber network onto the polymer substrate:
[0078] Spin-coat polymethyl methacrylate (PMMA) at a speed of 2500r / min on a silicon wafer for 40s to obtain a PMMA layer, then bake on a hot plate at 160°C for 140s; The polyamic acid (PI) solution was coated at a high speed for 70 seconds to form a PI layer, and the three-layer structure of the silicon wafer, the PMMA layer and the PI layer was taken as a wafer as a whole.
[0079] Place the silver nanofiber network obtained...
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