Large-aperture long-focal-length optical axis parallelism measuring system and measuring method thereof
A technology with parallel optical axis and measurement system, applied in the field of optical detection, to achieve the effects of high precision, long structural focal length and convenient image processing
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[0050] Conjunction with the accompanying Figure 1-10 , Specific embodiments of the present invention is described as follows:
[0051] Such as Figure 1-6 , The long axis parallel to the focal length of a large diameter measurement system, comprising: 1, 2 standard plane mirror, off-axis parabolic primary mirror 3, a hyperboloidal secondary mirror 4, a first dichroic mirror five dimensional precision adjustment bracket 5, the interferometer 6, a second beam splitter 7, a third dichroic mirror 8, a laser 9, the integrating sphere 10, a first optical wedge 11, a second wedge 12, CCD camera 13 and the computer 14. Standard plane mirror 2 is mounted on a five-dimensional precision adjustment bracket 1, five-dimensional precision accuracy adjustment bracket 1 is 1urad; standard flat mirror 2 Surface Accuracy of λ / 60; 4D interferometer is the interferometer 6, measurement accuracy of λ / 100.
[0052] 3 off-axis parabolic primary mirror, the secondary mirror hyperboloid 4, a first dich...
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