Color confocal displacement sensor and measuring method
A displacement sensor, color confocal technology, applied in chemical instruments and methods, measuring devices, instruments, etc., can solve the problems of insufficient uniformity of light intensity distribution, insufficient spectral distribution range, etc., to improve luminescence stability, reduce temperature, The effect of improving consistency
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Embodiment 1
[0020] An embodiment of the present invention relates to a color confocal displacement sensor, including a light source assembly and an incident optical fiber, the light source assembly includes a blue LED chip, and a collimator, a fluorescent lens, and a coupling that are sequentially arranged in front of the light path of the blue LED chip A lens, the incident optical fiber is aligned with the coupling lens, and the fluorescent lens is borosilicate glass uniformly dispersed with yellow phosphor powder;
[0021] The collimator includes a fast-axis collimator lens and a slow-axis collimator lens, the fast-axis collimator lens is arranged at the front position of the optical path, and the slow-axis collimator lens is arranged at the rear position of the optical path;
[0022] The color confocal displacement sensor also includes a confocal displacement sensor probe, the probe is fixedly connected to the light output end of the incident optical fiber, and the spectral confocal dis...
Embodiment 2
[0031] This embodiment relates to a color confocal displacement sensor, including a light source assembly and an incident optical fiber, the light source assembly includes a blue LED chip, and a collimator, a fluorescent lens, and a coupling lens sequentially arranged in front of the light path of the blue LED chip, The incident optical fiber is aligned with the coupling lens, and the fluorescent lens is borosilicate glass uniformly dispersed with red fluorescent powder;
[0032] The red phosphor is BaMgAl 9.6 o 17 :0.2Zr4+ ,0.2Ca 2+ Phosphor powder, its preparation method is: prepare by high-temperature solid-state reaction method, first weigh BaCO respectively according to the stoichiometric ratio 3 , MgO, Al 2 o 3 , ZrO 2 , CaCO 3 The required mass is accurate to ±0.0005g, and the purity of each raw material is not less than 99.99%. After mixing the weighing raw materials and adding absolute ethanol for 30 minutes, pre-calcine at 800-1000°C for 0.5-1h, and then in air...
Embodiment 3
[0036] This embodiment relates to a color confocal displacement sensor, including a light source assembly and an incident optical fiber, the light source assembly includes a blue LED chip, and a collimator, a fluorescent lens, and a coupling lens sequentially arranged in front of the light path of the blue LED chip, The incident optical fiber is aligned with the coupling lens, and the fluorescent lens is borosilicate glass uniformly dispersed with yellow and red phosphors, and the mass ratio of the yellow phosphor to the red phosphor is 1:2.2;
[0037] The yellow phosphor is cerium-activated yttrium aluminum garnet phosphor;
[0038] The red phosphor is BaMgAl 9.6 o 17 :0.2Zr 4+ ,0.2Ca 2+ Phosphor powder, its preparation method is: prepare by high-temperature solid-state reaction method, first weigh BaCO respectively according to the stoichiometric ratio 3 , MgO, Al 2 o 3 , ZrO 2 , CaCO 3 The required mass is accurate to ±0.0005g, and the purity of each raw material is...
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