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Color confocal displacement sensor and measuring method

A displacement sensor, color confocal technology, applied in chemical instruments and methods, measuring devices, instruments, etc., can solve the problems of insufficient uniformity of light intensity distribution, insufficient spectral distribution range, etc., to improve luminescence stability, reduce temperature, The effect of improving consistency

Active Publication Date: 2022-04-08
广州市合熠智能科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the light source used in the color confocal displacement sensor of the prior art is mostly LED, and its spectral distribution range is not comprehensive enough, and the light intensity distribution is not uniform enough.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] An embodiment of the present invention relates to a color confocal displacement sensor, including a light source assembly and an incident optical fiber, the light source assembly includes a blue LED chip, and a collimator, a fluorescent lens, and a coupling that are sequentially arranged in front of the light path of the blue LED chip A lens, the incident optical fiber is aligned with the coupling lens, and the fluorescent lens is borosilicate glass uniformly dispersed with yellow phosphor powder;

[0021] The collimator includes a fast-axis collimator lens and a slow-axis collimator lens, the fast-axis collimator lens is arranged at the front position of the optical path, and the slow-axis collimator lens is arranged at the rear position of the optical path;

[0022] The color confocal displacement sensor also includes a confocal displacement sensor probe, the probe is fixedly connected to the light output end of the incident optical fiber, and the spectral confocal dis...

Embodiment 2

[0031] This embodiment relates to a color confocal displacement sensor, including a light source assembly and an incident optical fiber, the light source assembly includes a blue LED chip, and a collimator, a fluorescent lens, and a coupling lens sequentially arranged in front of the light path of the blue LED chip, The incident optical fiber is aligned with the coupling lens, and the fluorescent lens is borosilicate glass uniformly dispersed with red fluorescent powder;

[0032] The red phosphor is BaMgAl 9.6 o 17 :0.2Zr4+ ,0.2Ca 2+ Phosphor powder, its preparation method is: prepare by high-temperature solid-state reaction method, first weigh BaCO respectively according to the stoichiometric ratio 3 , MgO, Al 2 o 3 , ZrO 2 , CaCO 3 The required mass is accurate to ±0.0005g, and the purity of each raw material is not less than 99.99%. After mixing the weighing raw materials and adding absolute ethanol for 30 minutes, pre-calcine at 800-1000°C for 0.5-1h, and then in air...

Embodiment 3

[0036] This embodiment relates to a color confocal displacement sensor, including a light source assembly and an incident optical fiber, the light source assembly includes a blue LED chip, and a collimator, a fluorescent lens, and a coupling lens sequentially arranged in front of the light path of the blue LED chip, The incident optical fiber is aligned with the coupling lens, and the fluorescent lens is borosilicate glass uniformly dispersed with yellow and red phosphors, and the mass ratio of the yellow phosphor to the red phosphor is 1:2.2;

[0037] The yellow phosphor is cerium-activated yttrium aluminum garnet phosphor;

[0038] The red phosphor is BaMgAl 9.6 o 17 :0.2Zr 4+ ,0.2Ca 2+ Phosphor powder, its preparation method is: prepare by high-temperature solid-state reaction method, first weigh BaCO respectively according to the stoichiometric ratio 3 , MgO, Al 2 o 3 , ZrO 2 , CaCO 3 The required mass is accurate to ±0.0005g, and the purity of each raw material is...

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PUM

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Abstract

The invention provides a color confocal displacement sensor, and belongs to the field of displacement sensors, the color confocal displacement sensor comprises a light source assembly and an incident optical fiber, the light source assembly comprises a blue light LED chip, and a collimator, a fluorescent lens and a coupling lens which are sequentially arranged on the blue light LED chip, the incident optical fiber is aligned with the coupling lens; the fluorescent lens is borosilicate glass on which yellow and / or red fluorescent powder is uniformly dispersed; by arranging the borosilicate glass lens containing the yellow and / or red fluorescent powder, the consistency of the LED light source is improved, meanwhile, the blue chip further excites the yellow / red fluorescent powder, the yellow / red light is increased, and the problems of incomplete spectrum and uneven light intensity caused by color shift are solved.

Description

technical field [0001] The invention relates to the field of displacement sensor devices, in particular to a color confocal displacement sensor and a measurement method. Background technique [0002] Color confocal displacement sensor, also known as spectral confocal sensor and dispersion confocal displacement sensor, uses a special color-coded lens to generate axial dispersion output of visible light, and analyzes the confocal return light wave signal through a spectral analyzer, and finally passes through The measured value of workpiece displacement is calculated from the conversion curve of wavelength and displacement; the principle is: a beam of polychromatic light (white) with a wide spectrum is emitted from the light source, and spectral dispersion occurs through the dispersion lens to form monochromatic light of different wavelengths. All correspond to a distance value to the measured object. The measurement light hits the surface of the object and is reflected back....

Claims

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Application Information

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IPC IPC(8): G01B11/02C09K11/64
Inventor 卿定求
Owner 广州市合熠智能科技股份有限公司
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