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Resonator

A resonator and substrate technology, applied in resonators, waveguide-type devices, superconductive devices, etc., can solve the problems of resonator loss, TLS loss, etc., and achieve the advantages of reduced loss, low TLS loss, and reduced interface area. Effect

Pending Publication Date: 2022-04-15
INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW) +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the use of photoresist, which is used in the prior art to underetch the resonator, is undesirable because the process of removing the photoresist can invite defects on the surface of the resonator: these defects can lead to Further resonator losses
Finally, resonators typically include a native oxide layer on their surfaces, which can lead to further TLS loss

Method used

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Experimental program
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Embodiment Construction

[0029] The invention will be described with reference to the specific embodiments and reference to the specific drawings, but the invention is not limited thereto only by the claims. The drawings described are merely illustrative and non-limiting. In the drawings, some elements of the elements can be amplified and not drawn ratio. The scale and relative dimensions do not correspond to the actual decrease in the implementation of the invention.

[0030] In addition, the terms first, second, and third, the following terms, second, and third, etc., are used to distinguish between similar elements, and not necessarily used to describe time, space, alignment, or any other way of other means. It should be understood that the terms thus used are interchangeable in appropriate, and embodiments of the invention described herein can be operated in different orders described herein.

[0031] In addition, the terms top, bottom, above, and lower, or the like in the specification and claims are...

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PUM

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Abstract

A method for forming a modified resonator (22), the method comprising: a. Obtaining a resonator (2) over a substrate (1), the resonator (2) comprising niobium or tantalum, thereby forming an interface region (21) between a bottom surface of the resonator (2) and a top surface of the substrate (1), and b. Contacting the resonator (2) with the substrate (1) with a liquid acidic etching solution, the liquid acidic etching solution is selected so as to have a higher etching rate to the substrate (1) than the etching rate to the resonator (2) and a non-zero etching rate to the resonator (2).

Description

Technical field [0001] The present invention relates to a resonator and a field thereof. In particular, the present invention relates to the field of resonators for realizing quantum bits. Background technique [0002] Resonators, especially superconductive resonators, is one of the basic components for implementing quantum bits (ie, "Qubit") for quantum calculations. In general, the resonator of the quantum circuit is a microwave transmission line, which is specifically designed to support resonance oscillation (ie, resonance) (ie, resonant microwave transmission line) in the support line under certain conditions. The resonator of the superconductive sub-device is usually implemented as a coplanar waveguide (CPW), which is a special type of microwave transmission line. Quantum calculations require low loss operations of the resonator. Preferably, the resonator of the quantum computer has a quality factor of at least 100,000,000, i.e., in each of the oscillator cycles, the resona...

Claims

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Application Information

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IPC IPC(8): H03H9/05H03H9/13H03H3/02
CPCH10N60/0156H10N60/01H01P7/00H01P11/008
Inventor A·帕科M·蒙吉洛A·波托奇尼克D·万J·韦尔乔
Owner INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)