Chip-level integrated Fabry-Perot optical MEMS acceleration sensor

Abstract

The invention relates to the technical field of micro-electro-mechanical systems, in particular to a chip-level integrated Fabry-Perot optical MEMS acceleration sensor which comprises a laser driving chip, a Vcsel laser chip, a Fabry-Perot MEMS acceleration sensitive chip, a sensitive photoelectric detection chip and a pre-amplification chip which are sequentially arranged from bottom to top. A first reference photoelectric detection chip and a second reference photoelectric detection chip are horizontally and symmetrically arranged on the two sides of the Vcsel laser chip, and the Vcsel laser chip, the first reference photoelectric detection chip and the second reference photoelectric detection chip are all arranged on the laser driving chip. According to the invention, chip-level integration is realized, and advantages of small size, low power consumption, high stability and easy three-axis integration are realized; in addition, the acceleration sensor is provided with a reference photoelectric detection chip and a sensitive photoelectric detection chip at the same time, so that the acceleration sensor has high resolution.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems, in particular to a chip-level integrated Fabry-Perot optical MEMS acceleration sensor. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) are micro-mechanical or electro-mechanical components with dimensions ranging from nanometers to millimeters manufactured by semiconductor processes, and are typically characterized by small size, low power consumption, and mass production. The acceleration sensor is a typical MEMS device, which can realize the measurement of acceleration, speed and position. Driven by the market demand of robots, drones, smart cars, and consumer electronics, the MEMS acceleration sensor has formed capacitance, resonance, pressure, etc. Different types such as resistors and optics, different characteristics such as high precision, low power consumption, and large range, and a complete product series for different purposes such as mili...

AI Technical Summary

Problems solved by technology

The former is limited in structural design due to the direct processing of the movable structure on the fiber core, and the process is difficult, resulting in poor performance of the acceleration sensor; although the latter has greatly improved the performance of the sensor by introducing the MEMS movable structure, it is in practice. In application, it is necessary to build a detection system consisting of desktop lasers, fiber couplers, photoelectric detectors, etc. The whole system is bulky, costly, and poor in practicability, which does not conform to the development direction of sensor miniaturization and integration

[0004] The optical fiber Fabry-Perot optical MEMS acceleration sensor disclosed in Chinese patent CN202110734577.5 adopts a wavelength demodulation method, and its resolution is limited by the performance of the spectrometer used for detection, resulting in poor sensor performance; while CN200910189829.X discloses Although the technical solution adopts the intensity demodulation method, the resolution of the sensor is no longer subject to the performance of the spectrometer, but it usually needs to build a detection system composed of a desktop laser, a fiber coupler, a photoelectric detector, etc., resulting in the entire acceleration detection system. Bulky, poor usability

For the integrated Fabry-Perot MEMS acceleration sensor, the Chinese patent CN202011125893.4 discloses a technical solution. Although the solution realizes the small-volume integration of the sensor, it adopts the wavelength demodulation method, and its resolution is low. When this solution is used, it is still necessary to build a responsive laser drive circuit and a photoelectric detection circuit to work normally, resulting in a larger overall size.

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