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Cleaning method of ceramic plate

A technology for ceramic plates and cleaning liquids, which is applied in the directions of cleaning methods, cleaning methods and utensils, chemical instruments and methods using liquids, etc., which can solve the problems of introducing impurities, improve adsorption capacity, avoid two-phase separation, and improve dispersibility. Effect

Active Publication Date: 2022-05-13
合肥微睿科技股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the problem that the existing fluorine-removing materials used in ceramic cleaning waste liquid are easy to introduce impurities on the ceramic surface, the present invention provides a cleaning method for ceramic plates. Fluorine material to achieve high-efficiency fluorine removal without introducing new impurities on the surface of the ceramic plate

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  • Cleaning method of ceramic plate
  • Cleaning method of ceramic plate
  • Cleaning method of ceramic plate

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Embodiment Construction

[0039] The following detailed description of exemplary embodiments of the invention refers to the accompanying drawings, which form a part hereof, and in which is shown by way of example an exemplary embodiment of the invention in which it can be practiced. While these exemplary embodiments have been described in sufficient detail to enable those skilled in the art to practice the invention, it should be understood that other embodiments can be implemented and that various changes can be made in the invention without departing from the spirit and scope of the invention. . The following more detailed description of the embodiments of the invention is not intended to limit the scope of the invention as claimed, but merely to illustrate and not limit the description of the features and characteristics of the invention, in order to suggest the best mode of carrying out the invention , and are sufficient to enable those skilled in the art to implement the present invention. Accord...

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Abstract

The invention discloses a cleaning method of a ceramic plate, and belongs to the technical field of ceramic production and environmental protection. According to the method disclosed by the invention, the microporous molecular sieve encapsulated nano metal ion defluorination material is applied to the ceramic cleaning solution, the microporous molecular sieve encapsulated nano metal ion defluorination material is prepared by introducing a metal ion complex into a microporous molecular sieve synthesis system, and metal ions are encapsulated in pore channels of the microporous molecular sieve in a crystallization process. And removing the structure-directing agent and the ligand of metal ions in the pore channel of the microporous molecular sieve through subsequent roasting. The method provided by the invention can realize efficient defluorination, has high stability, can be recycled for multiple times, and does not introduce new impurities on the surface of the ceramic plate.

Description

technical field [0001] The invention belongs to the technical field of ceramic production and environmental protection, and more specifically relates to a cleaning method for ceramic plates. Background technique [0002] In the manufacture of TFT-LCD, in the reaction chamber of dry etching and PECVD processes, non-volatile fluoride will be deposited on the parts, which will affect the cleanliness of the chamber. Therefore, these parts, including ceramic plates, must be cleaned regularly. The cleaning process In the process, the fluoride in the contaminated ceramic plate then enters the cleaning waste liquid. With the improvement of the country's environmental protection requirements and the emphasis on energy conservation and emission reduction, the pollution-free treatment of fluorine-containing wastewater has become a research hotspot in the field of environmental restoration, which is of great significance for protecting the environment and ensuring human health. At pres...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/08B08B3/10C01B39/40
CPCB08B3/08B08B3/10C01B39/40C01P2006/16C01P2006/12C01P2004/03
Inventor 郭畅刘晓刚权太植蔡广云朱勇方斌
Owner 合肥微睿科技股份有限公司
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