Superconducting nanowire single-photon detector with mid-infrared high-light absorption characteristic
A single-photon detector and superconducting nanowire technology, which is applied in the fields of semiconductor devices, climate sustainability, sustainable manufacturing/processing, etc., can solve the problems that it is difficult to ensure the flatness of the peak band of high light absorption rate at the same time, and achieve good Effect of in-band flatness
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[0020] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
[0021] The invention has a superconducting nanowire single-photon detector with mid-infrared high light absorption characteristics, uses NbN nanowires, silicon dioxide cavity and DBR to construct an asymmetric F-P cavity structure, and designs two types of single-layer NbN and double-layer NbN nanowires structure, the detector structure M1 when a single-layer niobium nitride nanowire is used, such as figure 1 As shown, it includes NbN nanowires, silicon dioxide cavity, distributed Bragg mirror, and 400 μm thick BK7 glass substrate arranged in sequence from top to bottom; when using double-layer NbN nanowires, the detector structure M2 is shown as figure 2 As shown, it includes niobium nitride nanowires, silicon dioxide isolation layers, niobium nitride nanowires, silicon dioxide cavities, distributed Bragg mirrors, and a 400 μm thick BK7 glass...
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