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Superconducting integrated circuit with NbN SNS Josephson junction and preparation method thereof

An integrated circuit and superconducting technology, applied in the field of superconducting electronics, can solve the problems of low integration and difficulty in stable formation of superconducting digital integrated circuits, and achieve improved coverage and repeatability, area saving, and high industrial utilization value effect

Pending Publication Date: 2022-05-31
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a superconducting integrated circuit with a NbN SNS Josephson junction and its preparation method, which is used to solve the problem of low integration of superconducting digital integrated circuits in the prior art and Difficult to stably form on silicon substrates

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  • Superconducting integrated circuit with NbN SNS Josephson junction and preparation method thereof
  • Superconducting integrated circuit with NbN SNS Josephson junction and preparation method thereof
  • Superconducting integrated circuit with NbN SNS Josephson junction and preparation method thereof

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Embodiment 1

[0069] This embodiment provides a method for preparing a superconducting integrated circuit with a NbN SNS Josephson junction, such as figure 1 As shown, it is a flow chart of the preparation method for forming the NbN SNS Josephson junction, including the following steps:

[0070] S1: Provide a substrate, and form a functional material layer including a NbN bottom layer film, a metal barrier layer, and an NbN top layer film sequentially from bottom to top on the substrate, wherein the substrate includes a base layer and a A buffer layer on the base layer;

[0071] S2: Etching the functional material layer to form a functional layer including a bottom electrode, a junction barrier layer and a top electrode, and forming a first isolation layer covering the exposed surface of the functional layer and the upper surface of the buffer layer ;

[0072] S3: Form a first contact hole whose bottom exposes the top electrode and a second contact hole whose bottom exposes the bottom ele...

Embodiment 2

[0118] This embodiment provides a superconducting integrated circuit with NbN SNS Josephson junction, such as Figure 11 As shown, it is a schematic cross-sectional structure diagram of the superconducting integrated circuit with NbN SNS Josephson junction, and the superconducting integrated circuit with NbN SNS Josephson junction includes a substrate 1, a functional layer 24, a first isolation layer 3, The first wiring part 41, the second wiring part 42, the second isolation layer 5, the first grounding material layer 61 and the second grounding material layer 62, wherein the substrate 1 includes a base layer 11 and the buffer layer 12 on the base layer 11, the functional layer 24 is located on the upper surface of the buffer layer 12 and includes a bottom electrode 241, a junction barrier layer 242 and a top electrode 243 stacked upwards, the bottom The material of the electrode 241 includes NbN, the junction barrier layer 242 includes a metal barrier layer, the material of ...

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Abstract

The invention provides a superconducting integrated circuit with a NbN SNS Josephson junction and a preparation method thereof.The superconducting integrated circuit comprises a substrate, a functional layer, a first isolation layer, a first wiring part, a second wiring part, a second isolation layer, a first grounding material layer and a second grounding material layer, the functional layer is located on the upper surface of the buffer layer and comprises a bottom electrode, a junction barrier layer and a top electrode which are stacked, and the first isolation layer covers the upper surface of the buffer layer and the exposed surface of the functional layer and is provided with a first contact hole and a second contact hole which are filled with the first wiring part and the second wiring part. The second isolation layer covers the upper surface of the first isolation layer and the exposed surfaces of the first wiring part and the second wiring part and is provided with a first through hole and a second through hole, and the first through hole and the second through hole are filled with the first grounding material layer and the second grounding material layer respectively. According to the invention, the thick junction barrier layer is adopted, the coverage rate of the barrier layer is improved, an external parallel resistor is not needed, and the circuit integration degree is improved.

Description

technical field [0001] The invention belongs to the field of superconducting electronics, and relates to a superconducting integrated circuit with NbN SNS Josephson junction and a preparation method thereof. Background technique [0002] The superconducting single flux quantum (SFQ, Single Flux Quantum) circuit was discovered, which mainly uses the superconducting Josephson junction as a switch, and whether there is a single flux quantum in the superconducting loop to represent logic information, with high speed and low power consumption Advantage. A superconducting digital integrated circuit is a multilayer structure with a Josephson junction as the core unit, and its circuit scale is highly dependent on factors such as the area occupied by the Josephson junction, the uniformity of the junction, and the area of ​​the transmission line. To realize the application of large-scale integrated circuits such as supercomputers, the circuits of superconducting chips need to be inte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L39/24H01L39/22H01L39/12H10N60/01H10N60/85
CPCH10N60/85H10N60/12H10N60/0156H10N60/0912
Inventor 张露陈垒王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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