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Vertically-coupled binary blazed sub-wavelength grating coupler integrated with bottom reflecting layer and preparation method of vertically-coupled binary blazed sub-wavelength grating coupler

A sub-wavelength grating and grating coupler technology, which is applied in the field of binary blazed sub-wavelength grating coupler and its preparation, can solve the problems of difficult manufacturing process, difficult component packaging, and inconvenient chip testing, and achieve convenient device testing, Easy-to-align, compact effect

Pending Publication Date: 2022-06-03
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The technical purpose of the present invention is to provide a vertically coupled binary blazed sub-wavelength grating coupler integrated with a bottom reflection layer and a preparation method to solve the problem of light coupling between an external optical fiber and a grating coupler in the prior art. The optical coupling efficiency between the two is low, the chip test caused by the non-vertical input / exit of the optical fiber is inconvenient, it is not easy to package the components, the device is not compact, the design is complicated, the repeatability is poor, the preparation process is difficult, and the processing capacity is large. The difference is small, the technical problem of high preparation cost

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  • Vertically-coupled binary blazed sub-wavelength grating coupler integrated with bottom reflecting layer and preparation method of vertically-coupled binary blazed sub-wavelength grating coupler
  • Vertically-coupled binary blazed sub-wavelength grating coupler integrated with bottom reflecting layer and preparation method of vertically-coupled binary blazed sub-wavelength grating coupler
  • Vertically-coupled binary blazed sub-wavelength grating coupler integrated with bottom reflecting layer and preparation method of vertically-coupled binary blazed sub-wavelength grating coupler

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Embodiment 1

[0073] see Figure 1 to Figure 3 , this embodiment provides a vertically coupled binary blazed subwavelength grating coupler integrated with a bottom reflective layer, including a thin film functional layer 3, a bonding layer 2, a bottom reflective layer 12 and a lining that are sequentially connected from top to bottom Bottom layer 1. figure 1 , figure 2 In order to facilitate the description of this embodiment, the external optical fiber is also put into it, and the optical fiber includes a cylindrical optical fiber inner core layer 5 and an optical fiber outer layer 4 surrounding the optical fiber inner core layer 5 . The lower bottom surface of the functional layer 3 is bonded and connected to the upper end surface of the bottom reflection layer 12 through the bonding layer 2, and the lower end surface of the bottom reflection layer 12 is connected to the upper end surface of the substrate layer 1. The substrate layer 1 is used to support and carry the bottom reflection ...

Embodiment 2

[0097] see Figure 4 to Figure 8 , this embodiment provides a method for preparing a vertically coupled grating coupler based on a binary blazed subwavelength grating based on Embodiment 1. Blazed subwavelength grating, vertically coupled grating coupler.

[0098] In this embodiment, the blaze effect of a grating with a continuous surface relief structure is approximately obtained by using a binary quantization method, and the central principal maximum of diffraction is transferred to a certain level of interference principal maximum, so that the coupling output The light energy is concentrated to this stage, thereby improving the optical coupling efficiency.

[0099] Specifically, for a conventional blazed grating, the grating array is also periodic, and a periodic structure is roughly as follows: Figure 4 (a). where the height of each blazed grating is H 1 , the shining angle is

[0100] The first equivalent of this blazed grating structure is converted into a discre...

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Abstract

The invention discloses a vertically-coupled binary blazed sub-wavelength grating coupler integrated with a bottom reflecting layer. The vertically-coupled binary blazed sub-wavelength grating coupler comprises a film functional layer, a bonding layer, the bottom reflecting layer and a substrate layer from top to bottom. The functional layer is of a ridge-shaped structure and comprises an input / output grating coupler and a photonic waveguide device area. The input / output grating coupler is symmetrically distributed and internally provided with a grating array which is periodically arranged and is of a binary blazed sub-wavelength structure, a primary sub-wavelength grating and a secondary sub-wavelength grating which are different in width are arranged in each period, and interval grooves different in width are formed between the adjacent sub-wavelength gratings. And the last secondary sub-wavelength grating is close to the middle optical waveguide area. The design is optimized to achieve the maximum optical coupling efficiency while the complexity of the device is reduced, the bottom reflecting layer is additionally arranged to prevent light from leaking to the bottom, the complete vertical coupling mode adopted between the optical fiber and the grating further facilitates testing of the device and packaging of a chip, the structure is compact, the preparation process is simple, and repeatability is good.

Description

technical field [0001] The invention belongs to the fields of semiconductor optoelectronics and communication, in particular to a vertically coupled binary blazed subwavelength grating coupler integrated with a bottom reflection layer and a preparation method thereof. Background technique [0002] With the continuous development of semiconductor optoelectronic technology, photonic devices and photonic integrated circuits play an increasingly important role in high-speed, large-capacity and large-bandwidth communications. In order to achieve effective optoelectronic interconnection, it is first necessary to realize the efficient coupling of light between the external optical fiber (external laser as the incident light source) and the on-chip photonic components. Among them, two common optical coupling methods are: end-face coupling and surface coupling based on grating coupler mechanism. The grating couplers (GCs, GC) prepared based on common photonic material platforms, con...

Claims

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Application Information

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IPC IPC(8): G02B6/34G02B5/18
CPCG02B6/34G02B5/1857G02B5/1861G02B5/1814
Inventor 程秀兰杨思攀权雪玲乌李英瞿敏妮王英李雅倩
Owner SHANGHAI JIAO TONG UNIV