Pretreatment device for boronizing internal chamber of fusion device and application of pretreatment device
A pretreatment device and boronization technology, which is applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of insufficiency and damage to the vacuum environment, simplify the operation steps, and eliminate the belt of pollutants. the effect of entering
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Embodiment 1
[0057] With the flapper valve closed, helium gas was introduced into the pre-ionization chamber to control the air pressure to 0.5Pa, and then the 13.56MHz radio frequency power supply was turned on to generate stable plasma. After that, boron powder with a purity of 99.99% and a particle size of 50 microns was injected into it, and the injection rate was 100 mg / min.
[0058] Open the plug valve, and through the visible spectrometer installed on the vacuum chamber of the fusion device, obvious boron spectral lines can be seen, indicating that the boron ions have entered the vacuum chamber of the fusion device, and the boronization function has been realized.
Embodiment 2
[0060] When the flapper valve is closed, hydrogen gas is introduced into the pre-ionization chamber, the air pressure is controlled to 0.06Pa, and then the 13.56MHz radio frequency power supply is turned on to generate stable plasma. After that, boron powder with a purity of 99.99% and a particle size of 70 microns was injected into it, and the injection rate was 150 mg / min.
[0061] Open the plug valve, and through the visible spectrometer installed on the vacuum chamber of the fusion device, obvious boron spectral lines can be seen, indicating that the boron ions have entered the vacuum chamber of the fusion device, and the boronization function has been realized.
Embodiment 3
[0063] With the flapper valve closed, helium gas was introduced into the pre-ionization chamber to control the air pressure to 0.05Pa, and then the 13.56MHz radio frequency power supply was turned on to generate stable plasma. After that, boron powder with a purity of 99.99% and a particle size of 90 microns was injected into it, and the injection rate was 100 mg / min.
[0064] Open the plug valve, and through the visible spectrometer installed on the vacuum chamber of the fusion device, obvious boron spectral lines can be seen, indicating that the boron ions have entered the vacuum chamber of the fusion device, and the boronization function has been realized.
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