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TiAlMoNbW high-entropy alloy target material and preparation process thereof

A high-entropy alloy and preparation technology, which is applied in metal material coating technology, vacuum evaporation plating, coating, etc., can solve problems such as poor density and uneven target material composition, and achieve close performance and composition distribution Effect of uniformity, strength and hardness improvement

Active Publication Date: 2022-06-24
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art, high-entropy alloy thin films are prepared by sputtering targets, but the target materials in the prior art have the problems of uneven composition, poor density, and no suitable element formula has been found, so it is difficult to prepare High wear resistance and high corrosion resistance high entropy alloy film

Method used

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  • TiAlMoNbW high-entropy alloy target material and preparation process thereof
  • TiAlMoNbW high-entropy alloy target material and preparation process thereof
  • TiAlMoNbW high-entropy alloy target material and preparation process thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0041] a. Preparation of raw materials: Ti, Al, Mo, Nb metal blocks and W metal powders with a purity of 99.99% are used, washed with acetone, and dried for use.

[0042] b, intermediate alloy refining, the present embodiment adopts vacuum non-consumable electric arc furnace melting, and the vacuum degree is 10 -2 -10 -4 Pa:

[0043] b1. At 1600 °C, firstly add Ti and Al metal blocks with an atomic ratio of 1:1 for smelting to obtain a TiAl master alloy. The melting points of Al and Ti are 933K and 1930K, respectively, which are the lowest melting point among the five alloy components. two metals, so choose to smelt TiAl master alloy first;

[0044] b2. After obtaining the TiAl master alloy, at 2600 °C, add Mo and Nb metal blocks with an atomic ratio of 1:1 to obtain a TiAlMoNb master alloy, and complete the preparation of the induction melting master alloy. The melting points of Mo and Nb are 2890K and 2890K respectively. 2741K, the difference between the two is similar an...

Embodiment 2

[0060] a. Preparation of raw materials: Ti, Al, Mo, Nb metal blocks and W metal powders with a purity of 99.99% are used, washed with acetone, and dried for use.

[0061] b, intermediate alloy refining, the present embodiment adopts vacuum consumable induction melting furnace, and the vacuum degree is 0.1-0.001Pa:

[0062] b1. At 800°C, two metal blocks, Ti and Al, with an atomic ratio of 1:1 are added for smelting to obtain a TiAl master alloy. The melting points of Al and Ti are 933K and 1930K, respectively, which are the lowest melting points among the five alloy components. two metals, so choose to smelt TiAl master alloy first;

[0063] b2. After obtaining the TiAl master alloy, at 2400 °C, add Mo and Nb metal blocks with an atomic ratio of 1:1 to obtain a TiAlMoNb master alloy, and complete the preparation of the induction melting master alloy. The melting points of Mo and Nb are 2890K and 2890K, respectively. 2741K, the difference between the two is similar and both ar...

Embodiment 3

[0072] a. Preparation of raw materials: Ti, Al, Mo, Nb metal blocks and W metal powders with a purity of 99.99% are used, washed with acetone, and dried for use.

[0073] b, intermediate alloy refining, the present embodiment adopts vacuum consumable induction melting furnace, and the vacuum degree is 0.1-0.001Pa:

[0074] b1. At 800°C, two metal blocks, Ti and Al, with an atomic ratio of 1:1 are added for smelting to obtain a TiAl master alloy. The melting points of Al and Ti are 933K and 1930K, respectively, which are the lowest melting points among the five alloy components. two metals, so choose to smelt TiAl master alloy first;

[0075] b2. After obtaining the TiAl master alloy, at 2400 °C, add Mo and Nb metal blocks with an atomic ratio of 1:1 to obtain a TiAlMoNb master alloy, and complete the preparation of the induction melting master alloy. The melting points of Mo and Nb are 2890K and 2890K respectively. 2741K, the difference between the two is similar and both are...

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Abstract

The invention relates to a TiAlMoNbW high-entropy alloy target material and a preparation process thereof, the high-entropy alloy target material comprises Ti, Al, Mo, Nb and W, the atomic ratio of Ti: Al: Mo: Nb: W is 1: 1: 1: 1: 1 at.%, the grain size of the target material is 1-20 [mu] m, and the density of the target material is more than 98%. The preparation process of the high-entropy alloy target material comprises the steps of raw material preparation, intermediate alloy refining, intermediate alloy powder preparation, high-entropy alloy powder preparation and forming. The high-entropy alloy target material is high in uniformity and density and can be used for preparing a high-wear-resistance and high-corrosion-resistance film.

Description

technical field [0001] The invention relates to the field of target preparation, in particular to a TiAlMoNbW high-entropy alloy target and a preparation process thereof. Background technique [0002] High-entropy alloy is a new type of multi-principal alloy material composed of five or more elements in (nearly) equal atomic ratios. Since high-entropy alloys are different from traditional alloys from the design concept, an equal atomic ratio or similar atomic ratio is selected. Multiple elements with an equal atomic ratio are the main elements, which determines that high-entropy alloys have different characteristics from traditional alloys. However, compared with traditional alloy materials, the research and development of high-entropy alloys started late, the experimental basis is relatively weak, and the theoretical work is still not detailed enough. As a result, although the new alloy has great application potential, there is still a lot to achieve industrial production a...

Claims

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Application Information

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IPC IPC(8): C22C30/00C22C1/02C22C1/04C23C14/34C23C14/14B22F9/14C23C14/35B22F3/14B22F3/04B22F3/10
CPCC22C30/00C22C1/02C22C1/04C23C14/3414C23C14/14B22F9/14C23C14/35B22F3/14B22F3/04B22F3/1007
Inventor 高明张虎王方方
Owner BEIHANG UNIV