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Method for preparing gradient Nb-Si-based alloy film by adopting multi-target co-deposition magnetron sputtering high-flux technology

A magnetron sputtering and co-deposition technology, which is applied in sputtering coating, metal material coating process, vacuum evaporation coating, etc., can solve the problem of reducing the mechanical properties of Nb-Si based alloys, the large variation range of Cr element content, Reduce the alloy's high-temperature oxidation resistance and other problems, and achieve the effect of increasing Si element content, high purity and high cost

Active Publication Date: 2022-06-24
GRIMAT ENG INST CO LTD
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Problems solved by technology

[0007] At present, the commonly used combination thin film high-throughput technology is to prepare composition-gradient alloy thin films by co-deposition magnetron sputtering technology of Cr target and Nb-Si-based alloy target, but the composition gradient prepared by two-target co-deposition technology The content of Cr element in the alloy film varies widely, often exceeding 65 at.%, too much Cr element will reduce the mechanical properties of Nb-Si based alloy, but reducing the content of Cr element will reduce the high temperature oxidation resistance of the alloy

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  • Method for preparing gradient Nb-Si-based alloy film by adopting multi-target co-deposition magnetron sputtering high-flux technology
  • Method for preparing gradient Nb-Si-based alloy film by adopting multi-target co-deposition magnetron sputtering high-flux technology
  • Method for preparing gradient Nb-Si-based alloy film by adopting multi-target co-deposition magnetron sputtering high-flux technology

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Embodiment 1

[0059] A method for preparing a high-purity gradient Nb-Si-based alloy thin film by using multi-target co-deposition magnetron sputtering high-throughput technology, comprising the following steps:

[0060] 1) Using Nb, B, Ti, and Al as synthetic raw materials, xNb-yB-zTi-kAl alloy target 4 is prepared by magnetic levitation induction melting, wherein x=61, y=7, z=26, k=6, numerical value All are atomic percent. Then cut into Φ60mm×5mm size.

[0061] 2) Using Si and Cr as raw materials respectively, using vacuum non-consumable arc melting technology to prepare Si ingots and Cr ingots, placing them in an electron beam melting furnace for electron beam purification, and then cutting them into sizes of Φ60mm×5mm. High purity Si target and Cr target.

[0062] a) The Cr target material 2, Si target material 3 obtained in step 2) and the 61Nb-7B-26Ti-6Al (at.%) alloy target material obtained in step 1) are polished with 60# water abrasive paper to remove surface oil;

[0063] b) ...

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Abstract

The invention discloses a method for preparing a gradient Nb-Si-based alloy film by adopting a multi-target co-deposition magnetron sputtering high-flux technology, and belongs to the technical field of gradient alloy film preparation. According to the method, on a high-purity Mo substrate, a high-purity Cr target material, a Si target material and an xNb-yB-zTi-kAl alloy target material co-deposition magnetron sputtering high-flux technology is adopted, and the Nb-Si-based alloy film with the gradient components is prepared. According to the method, performance testing can be conveniently carried out on Nb-Si-based alloys with different element proportions on a large scale, the optimal element composition proportion is rapidly selected, and the working efficiency is improved.

Description

technical field [0001] The invention belongs to the technical field of preparation of gradient alloy thin films, and in particular relates to a method for preparing gradient Nb-Si base alloy thin films by using multi-target co-deposition magnetron sputtering high-flux technology. Background technique [0002] With the continuous improvement of aero-engine performance, engine blades will withstand higher and higher operating temperatures. For example, engines with high thrust ratios require blades to have a temperature resistance of 1200-1400 °C. At present, the most advanced Ni-based superalloys can withstand a maximum temperature of 1150 °C, which cannot meet the requirements of high thrust ratio engine blades. Therefore, it is imperative to develop superalloys that can withstand higher temperatures. [0003] Metal Nb has excellent room temperature plastic toughness, Nb formed by Nb and Si 5 Si 3 The phase has a high melting point (Tm=2620°C) and a density (7.16g / cm 3 ) ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/58C22C27/02C22B9/22C22B34/34
CPCC23C14/352C23C14/3414C22C27/02C23C14/165C23C14/5806C22B9/228C22B34/34
Inventor 姜威
Owner GRIMAT ENG INST CO LTD
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