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Method for treating niobium oxide gate tube by using supercritical fluid with hydrogen peroxide as reactant

A technology of supercritical fluid and niobium oxide, applied in the direction of electrical components, etc., can solve the problems of continuous reduction, functional layer thickness reduction, mobility and reliability reduction, etc., achieve performance optimization effect, increase gating ratio, and reduce OFF The effect of state current

Pending Publication Date: 2022-07-01
HUBEI UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

High-k functional layers have been adopted to ensure the reduction of functional layer thickness. It is becoming more and more difficult to meet the continuous reduction of EOT with high-k materials and the returns are diminishing. At the same time, high-k materials will lead to higher interface state density and Reduced mobility and reliability, which is also a difficult problem that needs to be solved

Method used

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  • Method for treating niobium oxide gate tube by using supercritical fluid with hydrogen peroxide as reactant
  • Method for treating niobium oxide gate tube by using supercritical fluid with hydrogen peroxide as reactant
  • Method for treating niobium oxide gate tube by using supercritical fluid with hydrogen peroxide as reactant

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preparation example Construction

[0059] The preparation method of the niobium oxide gate tube of the present application can be prepared by a conventional magnetron sputtering method, and is specifically:

[0060] provide the bottom electrode;

[0061] Using metal titanium and niobium pentoxide as targets, and co-depositing on the surface of the bottom electrode by magnetron sputtering, titanium-doped niobium oxide is the conversion layer;

[0062] Using titanium metal as the target material, the titanium deposited on the surface of the conversion layer by magnetron sputtering is the top electrode;

[0063] In the process of preparing the conversion layer, the sputtering power of niobium pentoxide is 40-60W, and the sputtering power of titanium is 15-30W.

Embodiment 1

[0066] An embodiment of the present application provides a method for treating a niobium oxide gated tube with a supercritical fluid using hydrogen peroxide as a reactant, comprising the following steps:

[0067] S1. Provide a reaction chamber, use anhydrous ethanol to clean the reaction chamber, and then blow it dry; provide a quartz support, immerse the quartz support in 99.5% ethanol solution, ultrasonically vibrate, and after cleaning, blow the quartz support Dry; fix the niobium oxide gate tube on the quartz support, place the quartz support with the niobium oxide gate tube fixed in the reaction chamber, and add 500 μL of deionized water and 10 μL of 30% hydrogen peroxide into the reaction chamber ;

[0068] S2. Pour supercritical carbon dioxide fluid into the reaction chamber, control the pressure in the reaction chamber to be 3000 psi and the temperature to be 120°C, and react for 1.5 hours, and take out the niobium oxide gate tube after cooling down and releasing the p...

Embodiment 2

[0074] The method for treating a niobium oxide gated tube with a supercritical fluid using hydrogen peroxide as a reactant provided in the embodiment of the present application is the same as that in Example 1, except that 20 μL of hydrogen peroxide with a mass concentration of 30% is added in step S1, and the remaining process conditions are the same as Example 1 is the same.

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Abstract

The invention provides a method for treating a niobium oxide gate tube by using a supercritical fluid with hydrogen peroxide as a reactant, which comprises the following steps: placing the niobium oxide gate tube in a reaction cavity, and adding water and hydrogen peroxide into the reaction cavity; a supercritical carbon dioxide fluid is introduced into the reaction cavity, the pressure in the reaction cavity is controlled to be 2800-3200 psi, the temperature is 110-130 DEG C, and the reaction time is 1-2 h. According to the method disclosed by the invention, the prepared titanium-doped niobium oxide gate tube is treated by adopting a supercritical carbon dioxide fluid technology and using hydrogen peroxide and deionized water together as reactive substances, so that the OFF-state current of the device is successfully reduced, and the gate ratio is greatly improved. Due to the fact that hydrogen peroxide has better oxidability than deionized water, compared with the mode that deionized water is independently used as a reaction substance, hydrogen peroxide and deionized water are jointly used as the reaction substance, and the defects in the material and the device and at the interfaces of different materials can be better passivated.

Description

technical field [0001] The invention relates to the technical field of niobium oxide gate tube treatment, in particular to a method for treating a niobium oxide gate tube with supercritical fluid using hydrogen peroxide as a reactant. Background technique [0002] With the development of information technology, the requirements for information storage capacity are getting higher and higher. In order to increase the density of memory, the size of the device is continuously reduced. The gate tube based on the metal-insulator transition (MIT) effect has attracted extensive attention because of its simple material composition and easy preparation. For MIT-type strobes, based on titanium-doped NbO x The strobe tube shows a series of advantages such as Forming-free, ultra-high drive current, self-limiting, excellent transition voltage consistency, etc., but it has the disadvantages of large OFF-state current and relatively small gate ratio. This is not conducive to suppressing ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L45/00
CPCH10N70/231H10N70/026H10N70/011H10N70/8833
Inventor 马国坤何哲陈大磊王浩
Owner HUBEI UNIV
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