MEMS system and signal processing circuit
A signal processing module and signal technology, applied in the direction of electrostatic transducer microphones, etc., can solve the problems of high signal-to-noise ratio, difficult to meet, limited performance of MEMS microphones, etc., and achieve the effect of improving signal-to-noise ratio and improving performance.
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Embodiment 1
[0055] figure 1 This is a structural block diagram of the MEMS system provided in this embodiment. like figure 1 As shown, the MEMS system includes a bias voltage generating module 10 , a differential capacitive MEMS sensing module 20 , a signal processing module and a clock signal generating module 40 . The clock signal generation module 40 provides the clock signal Clk for the MEMS system, and although the clock signal generation module 40 in this embodiment is an internal clock module, as an optional embodiment, the clock signal generation module 40 may also be an external clock module, and the specific connection manner of the clock signal generation module 40 will be described below.
[0056] The bias voltage generation module 10 is used to generate N bias voltages, where N is greater than or equal to 2. In this embodiment, N=2, and the bias voltage generation module 10 has two output terminals, each of which outputs a bias voltage. The two bias voltages are the bias v...
Embodiment 2
[0113] Image 6 This is a structural block diagram of the MEMS system provided in this embodiment. like Image 6As shown, the difference from the first embodiment is that, in this embodiment, the bias voltage generating module 10 generates N bias voltages, and the MEMS unit, the signal processing module and the first high-resistance unit all have N, and N>2. The N MEMS units are all connected to the bias voltage generating module 10, the differential capacitance of each MEMS unit is connected to one of the bias voltages, and the N MEMS units are connected to the bias voltage according to the first common mode signal Vcom1, The capacitance variation generated by the N differential capacitors and the N bias voltages output N first voltage signals representing the sound signal, and the N first voltage signals are output through the N output terminals. The N signal processing modules are respectively connected to the N MEMS units, access the N first voltage signals and perform ...
Embodiment 3
[0118] Figure 7 This is a structural block diagram of the MEMS system provided in this embodiment. like Figure 7 As shown, the difference from Embodiment 1 and Embodiment 2 is that in this embodiment, the gain adjustment unit 322 is a single-ended input and double-ended output gain adjustment unit, so the two outputs of the gain adjustment unit 322 The terminal outputs differential signals Voutm and Voutp.
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