Preparation method of optical modulator based on glass microstructure array

Abstract

The invention provides a preparation method of an optical modulator based on a glass microstructure array. The preparation method comprises the following steps: manufacturing a silicon groove array on a silicon wafer; compactly filling glass powder in the silicon groove array; sintering the glass powder at high temperature to soften, reflow and cool the glass powder to form a glass microstructure array; planarizing the bottom surface of the glass microstructure array; etching or corroding the back surface of the silicon wafer to completely release the glass microstructure array, and forming a silicon support structure on the periphery of the glass microstructure array; depositing a transparent electrode layer on the surface of the glass microstructure array; another glass wafer is taken, a filling liquid inlet and a filling liquid outlet are machined in the glass wafer, and a transparent electrode layer is deposited on one side face of the glass wafer; and bonding the surface, on which the transparent electrode layer is deposited, of the glass wafer with the silicon supporting structure on the periphery of the glass microstructure array to form a closed cavity. According to the invention, the glass microstructure array with a high aspect ratio can be obtained, so that the optical modulator is prepared.

Description

technical field [0001] The present disclosure relates to the technical field of manufacturing micro-nano electromechanical systems, and in particular, to a preparation method of an optical modulator based on a glass microstructure array. Background technique [0002] Light field imaging restores the visual information of the three-dimensional world by calculating and processing the collected light field data, making up for the deficiency that traditional imaging can only record two-dimensional information, and is considered to be an important next-generation display imaging technology. [0003] Introducing an optical modulator into a camera is one of the main ways to realize light field acquisition at present. The use of glass microstructure arrays in optical modulators is a beneficial attempt to break the constraints between the light field acquisition angle and spatial resolution and maintain a high signal-to-noise ratio. Among them, the aspect ratio of the glass microstr...

AI Technical Summary

Problems solved by technology

The existing dry etching process is slow and costly. The current glass reflow process is generally realized by anodic bonding and high temperature annealing. There are still problems such as long processing time and difficult molding in the preparation of high aspect ratio glass microstructures.

Images