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Multi-channel high-density ultra-narrow stretchable microelectrode and preparation method and application thereof

A high-density, micro-electrode technology, applied in applications, electrodes, diagnostic recording/measurement, etc., can solve problems such as high cost, complicated packaging process, and complicated operation, and achieve high reliability

Pending Publication Date: 2022-08-02
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although photolithography can miniaturize the size of the electrode pattern, its operation is complicated, it has high requirements on the substrate and conductive materials, and it may cause damage to the electrode to a certain extent. The process conditions are harsh, the packaging process is relatively complicated, and the cost is high. , making it impossible to apply

Method used

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  • Multi-channel high-density ultra-narrow stretchable microelectrode and preparation method and application thereof
  • Multi-channel high-density ultra-narrow stretchable microelectrode and preparation method and application thereof

Examples

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Embodiment 1

[0039] In this example, a 32-channel high-density ultra-narrow stretchable microelectrode is prepared. The preparation method is as follows: figure 1 shown, including the following steps:

[0040] (1) Preparation of flexible substrate: Pour 15% by mass of SEBS toluene solution into a square polytetrafluoroethylene (PTFE) mold, air-dry to obtain a SEBS film with a thickness of about 300 microns, and the SEBS film faces the inner bottom of the mold One side of the mold has the inverted mold shape of the mold, which is a fog-like and incompletely flat state, which is recorded as the back side, and the other side is the flat shape after natural air drying, which has strong viscous and self-adhesive properties, and is recorded as the front side;

[0041] (2) Pre-stretching and fixing of the flexible substrate: the back of the flexible substrate is pasted and fixed with tape, which is recorded as the fixed area; the flexible substrate is pre-stretched, and the fixed area is not defo...

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Abstract

The invention discloses a multi-channel high-density ultra-narrow stretchable microelectrode as well as a preparation method and application thereof. The preparation method comprises the following steps: providing a flexible substrate; the flexible substrate comprises a stretching area and a fixing area; carrying out stretching amplification treatment on the stretching area; performing pattern sputtering on the flexible substrate subjected to stretching and amplification treatment through a mask plate to prepare a conductive layer; the stretching area is released to retract; and packaging to obtain the multi-channel high-density ultra-narrow stretchable microelectrode. According to the preparation method provided by the invention, the micro-crack gold film technology and the pre-stretching size amplification of the flexible substrate are combined, so that not only can the electrode be prepared into a multi-channel high-density ultra-narrow electrode, but also good tensile property and cycling stability of the electrode are ensured.

Description

technical field [0001] The invention relates to the technical field of flexible electrodes, in particular to a multi-channel high-density ultra-narrow stretchable micro-electrode and a preparation method and application thereof. Background technique [0002] In the prior art, flexible electrodes are prepared from flexible substrates and stretchable conductive materials (such as gold films). Among them, the preparation process of thin-film flexible stretchable electrodes has gradually matured, and large-scale production and patterning have been realized (Advanced Materials, 2019, 31(35): 1901360.). The current flexible and stretchable electrode arrays are limited by the characteristics of the fabrication process and materials, and the sensing point and width of the electrodes cannot be soft and stretchable in a small size, hindering the development of higher-density flexible electrode arrays. Therefore, how to prepare high-density flexible microelectrodes to achieve precise ...

Claims

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Application Information

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IPC IPC(8): A61B5/296A61B5/25A61N1/04C23C14/04C23C14/35
CPCA61B5/296A61B5/25A61N1/04C23C14/042C23C14/35A61B2503/40A61B2503/42A61B2562/125
Inventor 刘志远李韩飞李光林韩飞谢瑞杰赵行
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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