Cadmium and iron compound oxide air-sensitive semiconductor materials and air-sensitive element
A composite oxide and semiconductor technology, applied in the direction of material resistance, etc., can solve the problems of no interfering gas selectivity, no response-recovery characteristics, no stability, etc., to achieve high sensitivity, wide sensitivity, and wide working range. Effect
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Embodiment 1
[0023] Cadmium salt and iron salt are used as raw materials (Cd / Fe=1.0 / 2.0), dissolve them to form a mixed solution, add lye to adjust the pH value to make it co-precipitate, wash, filter, dry, and burn at 600°C for 2 hours A gas-sensitive material is formed. The gas-sensitive material is added to the binder and fully ground to make a slurry coated on a small Al with internal heating wire, gold electrode and rhodium-platinum lead. 2 o 3 on the ceramic tube. Keep warm at an appropriate temperature (such as 300°C for 1 hour, 600°C for 2 hours or more), then fire it into a thick film type side-heated gas sensor and age it for a week.
[0024] Measure its performance. Accompanying drawing 1 is the sensitivity and temperature relation graph of gas sensor. As can be seen from accompanying drawing 1, gas sensor of the present invention is to 5ppmC 2 h 2 Gas sensitivity is as high as 20 times at around 270°C, while 3000ppmH 2 , CO and 300ppm C 2 h 4 are not more than 5 times,...
Embodiment 2
[0028] The operating procedure is as in Example 1, and Cd / Fe=1.0 / 2.5 is taken. Although the sensitivity of the gas sensor decreases slightly, the working temperature (280°C) that reaches the highest sensitivity decreases significantly (320°C when Cd / Fe=1.0 / 2.0 )
Embodiment 3
[0030] Operating procedure is according to embodiment 1, gets Cd / Fe=1.0 / 1.0, and the sensitivity of element has significantly improved to ethanol, reaches the temperature of highest sensitivity to descend to some extent, reaches 100 (when Cd / Fe=1.0 / 2.0 in the time of 300 ℃, S=70 at 320°C).
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