Explosives detector and fabrication method
A technology for explosives and detectors, which is used in the field of instruments and meters to detect dangerous goods, and can solve problems such as experimental prototypes that have not yet been developed.
Inactive Publication Date: 2006-01-11
HEFEI INST OF INTELLIGENT MACHINERY CHINESE ACAD OF SCI
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The technology is still in the laboratory stage and no experimental prototype has been developed yet.
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[0066] figure 1 It is an explosives detector proposed by the present invention, which is composed of three parts: an explosives sampling device, a silicon sensitive array pair, and a signal control and processing circuit 12 . Firstly, the silicon sensitive array 7 with relatively difficult process is manufactured, and the processing steps are as follows:
[0067] 1) Select double-sided polished silicon wafers for chemical cleaning. The diameter of the silicon wafers is 2 to 8 inches, and a silicon wafer with a diameter of 3 to 4 inches is taken, with a thickness of 300 to 500 microns and a resistivity of 10 ohm cm. 100, 110, 111 or other crystal orientation silicon wafers are available;
[0068] 2) Carry out thermal oxidation to the cleaned silicon chip, grow a layer of silicon dioxide on both sides of the silicon chip, and its thickness is 0.3 microns;
[0069] 3) Deposit a layer of polysilicon on the silicon dioxide surface on the front side of the silicon wafer with a thi...
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Abstract
The invention is an exploder detector and making method, where the detector includes sampling device, silicon sensitive array pair and signal control and processing circuit. The sampling device includes ultrasonic emitter, negative pressure inlet fan and ultrasonic vibration pipeline, and is applied to sampling the exploder particles and transmits them on to the surfaces of the silicon sensitive array. The silicon array pair is two mutual- dislocated double-end fixed and supported silicon beams, installed inside the ultrasonic vibration pipeline, not only enhancing the probability of sampling the exploder particles and at the same time having no effect on the air flow in the pipeline. The silicon sensitive array is made by microelectronic mechanical system technique and detects by the property of smelting and heat absorbing of the exploder. The output signal of the silicon beam is read by strobe circuit and differentially amplified, then compared with the signal stored in the memory when there is no exploder particle, further justifying if there is exploder existing on the silicon beam. It can detect many kinds of solid exploders, able to be applied to the safety inspection in various public places
Description
technical field [0001] The invention relates to the field of instruments and meters for detecting dangerous goods, in particular to an explosive detector and a manufacturing method. Background technique [0002] Currently known explosive detectors mainly include metal detectors, X-ray detection equipment, thermal neutron activation detection equipment, spectral analyzers, "electronic noses" (chemical sensors), ion mobility spectrometry detectors, and the like. [0003] Metal detectors can only be used to detect suspicious objects with metal devices, provide information for identifying explosive devices, and conduct physical examinations of people, but they cannot detect plastic explosives often used by terrorists. X-ray detection equipment also cannot detect plastic explosives, and it has radiation safety concerns, so only luggage can be checked. [0004] Thermal neutron activation detection equipment can directly detect the composition of explosives, so it has high accurac...
Claims
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IPC IPC(8): G01N25/04G01K7/16G01N33/22G01N25/00G01N25/02G01N25/14
Inventor 孔德义梅涛陶永春张涛孙斐张成梅陈茅倪林王锐张彦
Owner HEFEI INST OF INTELLIGENT MACHINERY CHINESE ACAD OF SCI