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Method for fabricating a carbon nanotube chip and a biochip using the self-assembly of super molecules and staining of metal compound

A metal compound, carbon nanotube technology, applied in oriented carbon nanotubes, metal/metal oxide/metal hydroxide catalysts, biochemical equipment and methods, etc. Weak environmental changes, etc.

Inactive Publication Date: 2007-08-15
KOREA ADVANCED INST OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method has the following disadvantages: its process is complicated, and the distance between patterns is still at the level of tens to one hundred nanometers
Moreover, the use of block copolymers has the following problems: the aspect ratio of the formed pattern is not large, the structure of the film is complicated, and it is not easy to give the structure orientation for the thin belly
However, it has the disadvantage of being relatively weak to environmental changes

Method used

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  • Method for fabricating a carbon nanotube chip and a biochip using the self-assembly of super molecules and staining of metal compound
  • Method for fabricating a carbon nanotube chip and a biochip using the self-assembly of super molecules and staining of metal compound
  • Method for fabricating a carbon nanotube chip and a biochip using the self-assembly of super molecules and staining of metal compound

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0076] Embodiment 1: the synthesis of supramolecular

[0077] The supramolecule of formula (1) used in the present invention is synthesized through the steps of the following reaction scheme (1). Scanning electron microscope analysis of the supramolecule confirmed that the supramolecule is a nanoscale or smaller-scale regular cylindrical structure ( FIG. 4 ).

[0078] (Reaction Diagram 1)

[0079]

Embodiment 2

[0080] Embodiment 2: substrate surface modification

[0081] In the present invention, the above-mentioned metal catalysts are deposited onto silicon wafers by methods such as thermal deposition, electron beam deposition, or spotters, thereby forming Fe, Ni, Co, or a thin film of an alloy of these three metal catalysts , as a catalyst to synthesize CNTs (Figure 2a).

Embodiment 3

[0082] Embodiment 3: the formation of supramolecular film

[0083] The supramolecule synthesized in Example 1 was dissolved in tetrahydrofuran (THF) solvent. The resulting solution was spin-coated on the silicon wafer of Example 2 to form a thin film (FIG. 2a). In this example, spin coating was performed at 2,000-3,000 rpm for 10-30 seconds. During this spin coating process, the thickness of the film can be appropriately changed.

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Abstract

A method for fabricating a carbon nanotube (CNT) nanoarray, which includes the steps of forming a thin film of supramolecules on a substrate on which metal catalyst for CNT synthesis is deposited, inducing the self-assembly of the supramolecules by annealing to form a regular structure, selectively staining the formed regular structure with a metal compound, etching the metal compound-stained thin film to form a nanometer or smaller size pattern, forming a nanopattern of metal catalyst by using the nanopattern of supramolecules stained with the formed metal compounds, and growing carbon nanotubes (CNTs) vertically on the formed metal catalyst nanopattern. A biochip is readily fabricated by binding bioreceptor(s) to CNTs of the CNT nanoarray.

Description

technical field [0001] The invention relates to a method for preparing a carbon nanotube (CNT) nanochip, which comprises the following steps: generating a supramolecular film on a substrate, inducing the self-assembly of the supramolecule through annealing to form a regular pattern, and using a metal compound to The formed regular pattern is selectively colored, and then the metal compound colored film is etched, thereby forming a nanoscale or smaller-scale metal catalyst pattern and longitudinally growing carbon nanotubes (CNTs) on the formed metal catalyst pattern. The present invention also relates to a method for preparing a biochip, which includes the step of connecting the bioreceptor with the CNT chip prepared above. Background technique [0002] Currently, the formation of surface patterns has been achieved by photolithography using polymer films as photoresists. However, using this method to prepare nanoscale, highly precise patterns has encountered many difficulti...

Claims

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Application Information

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IPC IPC(8): G03F7/20C01B31/00B01J23/74B82B3/00G01N33/50G01N33/53C01B31/02C12M1/00C12N15/09G01N37/00
CPCC01B31/0233B82Y30/00C01B2202/08B82Y40/00C01B32/162B82B3/00B82Y15/00B82Y5/00
Inventor 郑喜台郑大焕权起暎李修林崔度桓
Owner KOREA ADVANCED INST OF SCI & TECH