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Method for forming gratings by laser direct writing device

A technology of circular grating and laser beam, which is applied in the field of circular grating and manufacturing measurement length, which can solve the problems of many manufacturing processes, unfavorable indexing measurement, and poor linearity, so as to improve work efficiency and reliability, simplify hardware processes, and improve the grid line edge. clear effect

Inactive Publication Date: 2003-06-18
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0007] The round and long gratings manufactured by this traditional method have unsatisfactory grating quality, that is, the edge of the grating line is hairy, the steepness is small, and the straightness is poor. These will directly affect the quality of the photoelectric signal extracted from the grating device, which is unfavorable for graduation measurement. and the manufacturing process is many, complicated and the cycle is long

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  • Method for forming gratings by laser direct writing device
  • Method for forming gratings by laser direct writing device
  • Method for forming gratings by laser direct writing device

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Embodiment Construction

[0027] The present invention will be described below in detail by taking a circular grating as an example according to the accompanying drawings, and this example is also suitable for manufacturing long gratings or gratings of other shapes.

[0028] figure 1 The computer [8] in is a special-purpose computer, and various special-purpose programs are housed in it to form the computer control system. The opening or closing of the light source exposure in the exposure controller [4] is controlled by a dedicated computer. The light beam diameter of the light scanning head [5] can be adjusted, the smallest can reach 0.7 μm, and the precision is 0.1 μm. The diameter of the scanning light is related to the processing quality and efficiency. If the scanning light is too thick, the edge quality of the grating line will be reduced; if the scanning light is too thin, it will improve the quality of the line, but it will increase the time for manufacturing the grating. Therefore, it is g...

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Abstract

The method of making grating using laser direct writing apparatus is mainly used to make and measure long or circular grating. The laser direct writing apparatus is used to expose to light the rough blank of grating coated with photo-sensitive materials, the manufacturing process being controlled automatically by a computer. The operating steps are: The special computer controlling system sends a driving instruction to a displacement driver; the displacement driver drives a making platform to move, a displacement sensor transmits the amount of displacement of the working platform to the computer, comparing the amount with the ruling positions stored in the computer; if "Yes", the computer sends an instruction to an exposure controller to start a light beam scanning head to make an exposure, if "No", it sends an instruction to turn off the scanning head not to make exposure.

Description

1. Technical field [0001] The invention is a method for manufacturing a grating, which is mainly used for manufacturing long and circular gratings. 2. Background technology [0002] Usually, the devices for making gratings are mostly long and round reticle machines. Taking photolithography as an example, the process of manufacturing a circular grating is roughly as follows: [0003] A mechanical knife carves a single slit on the glass sheet coated with an opaque color layer, and uses a "knife" to carve a light-transmitting single slit. The width of the single slit depends on factors such as the line width of the circular grating and the manufacturing process of the single slit. 5-10μm; [0004] The optical lithography sector installs the single slit on the small boat of the circular engraving machine bracket (also called the knife bridge), adjusts the center distance between the single slit and the circular engraving machine (that is, the radius of the circular grating lin...

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Application Information

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IPC IPC(8): G02B5/18G03F7/20G05B19/00
Inventor 叶盛祥杜春蕾白临波邱传凯黄尚文
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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