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Method for preparing titanium dioxide film under room temperature

A technology of titanium dioxide and thin film, which is applied in the field of preparing titanium dioxide thin film, achieves the effect of good repeatability, simple and easy method, and widening the selection range

Inactive Publication Date: 2004-01-14
INST OF CHEM CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, the application number CN96112659 discloses a method of utilizing hydrolysis to convert TiO 2 A method in which films are deposited directly on substrate surfaces, but still requires firing

Method used

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  • Method for preparing titanium dioxide film under room temperature
  • Method for preparing titanium dioxide film under room temperature
  • Method for preparing titanium dioxide film under room temperature

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] After cleaning the conductive glass substrate, dry it with nitrogen gas, place it on the sample holder of the sputtering instrument, use pure titanium as the target material, and take it out after sputtering for 230 seconds. At this time, a layer of metal titanium is coated on the conductive substrate. membrane. Using 1M nitric acid solution as the electrolyte solution, the voltage is 15V, and the current is controlled at 0.1mA-1A to electrolyze the film to obtain anatase TiO with nano-scale microporous structure. 2 film, it can be seen that the porous film is made of TiO 2 Composed of nano-scale particles, the size of the micropores is about 50-200nm and the appearance is as attached figure 1 . This film has photoelectric response, as attached figure 2 . The nanoscale microporous TiO 2 Thin films can be efficiently combined with dyes to form dye-sensitized TiO 2 Thin film electrode, its photoelectric response spectrum as attached image 3 .

Embodiment 2

[0031] After cleaning the conductive glass substrate, dry it with nitrogen gas, place it on the sample holder of the sputtering instrument, use pure titanium as the target material, and take it out after sputtering for 230 seconds. At this time, a layer of metal titanium is coated on the conductive substrate. membrane. Using 1M sulfuric acid solution as the electrolyte solution, the voltage is 15V, and the current is controlled at 0.1mA-1A to electrolyze the film to obtain anatase TiO with nano-scale microporous structure. 2 Thin film, this film has photoelectric response. The nanoscale microporous TiO 2 Thin films can be efficiently combined with dyes to form dye-sensitized TiO 2 thin film electrodes.

Embodiment 3

[0033] After cleaning the conductive glass substrate, dry it with nitrogen gas, place it on the sample holder of the sputtering instrument, use pure titanium as the target material, and take it out after sputtering for 200 seconds. At this time, a layer of metal titanium is coated on the conductive substrate. membrane. Using 1M nitric acid solution as the electrolyte solution, the voltage is 15V, and the current is controlled at 0.1mA-1A to electrolyze the membrane to obtain TiO with nano-scale microporous structure. 2 Thin film, this film has photoelectric response. The nanoscale microporous TiO 2 Thin films can be efficiently combined with dyes to form dye-sensitized TiO 2 thin film electrodes.

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Abstract

A process for preparing TiO2 film at room temperature includes such steps as evaporating metal titanium on electrically conductive substrate by vacuum sputter method and electrochemically oxidizing it. The resultant film has nano-class minipore structure and can generate photocurrent and photovoltage. After it is sensitised by dye, it can be used for solid-state or liquid-state solar battery.

Description

technical field [0001] The invention belongs to the technical field of functional materials, and in particular relates to a method for preparing titanium dioxide thin films at room temperature. Background technique [0002] Titanium dioxide is one of the most widely studied chemical substances, and titanium dioxide thin films have a wide range of applications. Titanium dioxide can be used as an anti-corrosion material, and as a photocatalyst in solar energy conversion processes. Titanium dioxide has three ore types, namely rutile type, anatase type and octahedral type (brookite). Among them, the anatase titanium dioxide crystal has remarkable photocatalytic properties, and can be used for antifouling, antibacterial, odor removal, and photoelectric response. [0003] Since the 1990s, scientists have discovered that dye-sensitized titanium dioxide nanocrystalline composites have high photoelectric conversion efficiency. This amazing phenomenon is due to t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J21/06B01J37/00C23C28/04
Inventor 翟锦常琳江雷
Owner INST OF CHEM CHINESE ACAD OF SCI
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