Method for producing protein chip
A protein chip and manufacturing method technology, applied in the field of biosensing, can solve the problem of low integration and achieve the effect of ensuring activity
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Embodiment 1
[0016] Embodiment 1: the concrete processing steps of the present invention are as follows:
[0017] a. First, standard semiconductor technology is used to clean and thermally oxidize the silicon wafer; the surface of the cleaned and thermally oxidized silicon wafer has a layer of 500 nanometer silicon dioxide layer;
[0018] b. immerse the above-mentioned pretreated silicon wafer in γ-amino-propyl-triethylsilane (γ-APTES) for 10 minutes, so that the surface of the silicon wafer has amino groups and has affinity for protein molecules;
[0019] c. Adopt atomic force microscope (AFM) nano-etching technology to etch nano-patterns on the above-mentioned processed silicon wafer surface; the etching method is: apply a voltage between the atomic force microscope probe and the silicon surface, so that Atoms are oxidized into silicon dioxide; the probe is moved and etched into a square array with a side length of 200 nanometers and a line width of 50 nanometers. The amino group on the ...
Embodiment 2
[0021] Embodiment two: the concrete processing steps of the present invention are as follows:
[0022] a. First, standard semiconductor technology is used to clean and thermally oxidize the silicon wafer; there is a silicon dioxide layer of 800 nanometers on the surface of the cleaned and thermally oxidized silicon wafer;
[0023] b. immerse the above-mentioned pretreated silicon wafer in γ-amino-propyl-triethylsilane (γ-APTES) for 10 minutes, so that the surface of the silicon wafer has amino groups and has affinity for protein molecules;
[0024] c. Adopt atomic force microscope (AFM) nano-etching technology to etch nano-patterns on the above-mentioned processed silicon wafer surface; the etching method is: apply a voltage between the atomic force microscope probe and the silicon surface, so that Atoms are oxidized into silicon dioxide; move the probe, etch concentric circles with a radius of 200 nanometers and 400 nanometers and a line width of 50 nanometers. The 100 nm an...
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