High precision combined optical grating device for optical 3D measurement

A three-dimensional measurement, high-precision technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of inability to effectively ensure accurate grating alignment, small grating size, low maximum light intensity, etc., and achieve important engineering practical value, guarantee Accuracy and stability, the effect of significant economic benefits

A three-dimensional measurement, high-precision technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of inability to effectively ensure accurate grating alignment, small grating size, low maximum light intensity, etc., and achieve important engineering practical value, guarantee Accuracy and stability, the effect of significant economic benefits

CN1554925AInactive Publication Date: 2004-12-15SHANGHAI JIAO TONG UNIV
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  • High precision combined optical grating device for optical 3D measurement
  • High precision combined optical grating device for optical 3D measurement
  • High precision combined optical grating device for optical 3D measurement

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Embodiment Construction

[0014] The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.

[0015] like figure 1 As shown, the combined grating device of the present invention mainly adopts the method of electron beam scanning lithography to sequentially engrave 13 grating diagrams on the quartz glass sheet 1 for lithography with a very small expansion rate. The first frame is the projector calibration grating 2, the second frame is the all-white grating 3, the third to the tenth frame is the Gray code grating 4, and the 10th to the 13th frame is the phase shift grating 5. like figure 2 As shown, the black and white stripes in the Gray code grating 4 represent logical values ​​0 and 1 respectively, then the eight gratings form an 8-bit Gray code, and the width of each grating edge stripe is half the width of the middle stripe. The grating starts, and the width of the subsequent fringes is successively reduced by half compared...

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Abstract

The high precision combined grating device for 3D optical measurement includes 13 grating patterns etched on quartz glass via electronic beam scanning process, including 1 projector calibrating grating, 1 all-white grating, 8 Gray code gratings and 4 phase shift gratings, with the first phase shift grating being the last Gray code grating. All the gratings are in the same size, and have parallel stripes arranged orderly on the quartz glass and in the shift direction of the projecting mechanism to ensure the alignment precision. The present invention can meet the requirement of 3D optical measurement based on the Gray code method and 3D optical measurement based on phase shift method simultaneously, ensues the measurement precision and stability and has practical engineering application value.

Description

Technical field: [0001] The invention relates to a grating device, in particular to a high-precision combined grating device for optical three-dimensional measurement, comprising a projector calibration grating, a Gray code grating and a phase-shift grating made based on an electron beam scanning lithography method, belonging to mechanical engineering and optics measurement technology. Background technique: [0002] With the increasingly fierce competition in the global market, reverse engineering, as an important technology for rapid product development and product innovation design, has been widely valued and widely used in the industry. The three-dimensional measurement of objects is the first step in reverse engineering, and the accuracy of the measurement results directly affects the quality of the reverse, which plays a very important role. Optical 3D measurement is widely used at present and has become an important way of 3D measurement. In an optical three-dimensio...

Claims

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Application Information

Patent Timeline
15 Dec 2004
Publication
CN1554925A
IPC
G01B11/24
Inventors
δΈ₯隽ηͺ; δΉ δΏŠι€š