High speed percision polishing device and polishing method with diamond film
A diamond film, precision polishing technology, applied in polishing machine tools, metal processing equipment, manufacturing tools, etc., can solve the problems of high heating temperature of polishing disc, large warping deformation of polishing disc, large temperature gradient, etc. The effect of small warpage deformation and small temperature gradient
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[0010] As shown in the figure, the structural scheme and working process of the present invention are further described in conjunction with examples.
[0011] A diamond film high-speed precision polishing device and polishing method, the polishing device includes a bed 1, a polishing disk drive device, a diamond film drive device, a vacuum polishing chamber cover 3 and a heater 5, and the polishing disk drive device is arranged on the vacuum polishing chamber cover 3, and are respectively fixed on the bed 1 by bolts. The vacuum polishing outer cover 3 is arranged on the bed 1, the diamond film driving device is fixed on the vacuum polishing outer cover 3 by bolts, and the electromagnetic heater 5 is arranged on the upper support 4 of the polishing disc driving device; Optical disc 6, flange plate 19, support body 20, polishing main shaft 21, fixed disc 22, speed-regulating motor 23, polishing disc 6 is fixed on the polishing main shaft 21 with screw by pressing plate, and poli...
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