High speed percision polishing device and polishing method with diamond film

A diamond film, precision polishing technology, applied in polishing machine tools, metal processing equipment, manufacturing tools, etc., can solve the problems of high heating temperature of polishing disc, large warping deformation of polishing disc, large temperature gradient, etc. The effect of small warpage deformation and small temperature gradient

Inactive Publication Date: 2005-03-02
SHENYANG LIGONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the technical problems such as high heating temperature of the polishing disk, large temperature gradient between the upper and lower surfaces, large warping deformation of the polishing disk, and poor polishing quali

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  • High speed percision polishing device and polishing method with diamond film

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Embodiment Construction

[0010] As shown in the figure, the structural scheme and working process of the present invention are further described in conjunction with examples.

[0011] A diamond film high-speed precision polishing device and polishing method, the polishing device includes a bed 1, a polishing disk drive device, a diamond film drive device, a vacuum polishing chamber cover 3 and a heater 5, and the polishing disk drive device is arranged on the vacuum polishing chamber cover 3, and are respectively fixed on the bed 1 by bolts. The vacuum polishing outer cover 3 is arranged on the bed 1, the diamond film driving device is fixed on the vacuum polishing outer cover 3 by bolts, and the electromagnetic heater 5 is arranged on the upper support 4 of the polishing disc driving device; Optical disc 6, flange plate 19, support body 20, polishing main shaft 21, fixed disc 22, speed-regulating motor 23, polishing disc 6 is fixed on the polishing main shaft 21 with screw by pressing plate, and poli...

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Abstract

The polishing apparatus includes bed, polishing disc driver, diamond film driver, vacuum polishing chamber housing and heater. The polishing disc driver is set inside the vacuum polishing chamber housing, the diamond film driver is fixed on the vacuum polishing chamber housing, the heater is set on the upper support and the diamond film is mounted onto the polishing head. By means of combining the high speed relative motion between the polishing disc and the diamond film to produce friction heat with the low temperature heating in the bottom of the polishing disc, the surface of the diamond film reaches the diffusion temperature fast and the raised carbon atoms in the surface of the diamond film diffuse to the polishing disc of iron, nickel and other metal to reach the aim of polishing. The present invention has the advantages of simple structure, high polishing quality, high polishing efficiency, low production cost, etc.

Description

technical field [0001] The invention belongs to superhard material polishing technology, in particular to a diamond film high-speed precision polishing device and polishing method. Background technique [0002] Diamond film is a pure diamond polycrystalline film deposited by chemical vapor deposition technology. It not only has high hardness and wear resistance, but also has excellent electrical insulation, thermal conductivity, light transmission and acoustic properties. Promising new materials are widely used in high-tech fields and cutting-edge defense technology fields. Since the diamond film is a polycrystalline film, the surface of the vapor-deposited diamond film is rough and poor in uniformity, so it must be ground and polished in industrial applications, especially in high-tech applications, not only requires the diamond film to have a very small surface roughness Degree, and requires high flatness. Due to the extremely high hardness of the diamond film, the effic...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B39/06
Inventor 黄树涛
Owner SHENYANG LIGONG UNIV
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