High speed percision polishing device and polishing method with diamond film

Abstract

The polishing apparatus includes bed, polishing disc driver, diamond film driver, vacuum polishing chamber housing and heater. The polishing disc driver is set inside the vacuum polishing chamber housing, the diamond film driver is fixed on the vacuum polishing chamber housing, the heater is set on the upper support and the diamond film is mounted onto the polishing head. By means of combining the high speed relative motion between the polishing disc and the diamond film to produce friction heat with the low temperature heating in the bottom of the polishing disc, the surface of the diamond film reaches the diffusion temperature fast and the raised carbon atoms in the surface of the diamond film diffuse to the polishing disc of iron, nickel and other metal to reach the aim of polishing. The present invention has the advantages of simple structure, high polishing quality, high polishing efficiency, low production cost, etc.

Description

technical field [0001] The invention belongs to superhard material polishing technology, in particular to a diamond film high-speed precision polishing device and polishing method. Background technique [0002] Diamond film is a pure diamond polycrystalline film deposited by chemical vapor deposition technology. It not only has high hardness and wear resistance, but also has excellent electrical insulation, thermal conductivity, light transmission and acoustic properties. Promising new materials are widely used in high-tech fields and cutting-edge defense technology fields. Since the diamond film is a polycrystalline film, the surface of the vapor-deposited diamond film is rough and poor in uniformity, so it must be ground and polished in industrial applications, especially in high-tech applications, not only requires the diamond film to have a very small surface roughness Degree, and requires high flatness. Due to the extremely high hardness of the diamond film, the effic...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the technical problems such as high heating temperature of the polishing disk, large temperature gradient between the upper and lower surfaces, large warping deformation of the polishing disk, and poor polishing quality when the existing diamond film surface is polished, and to provide a simple structure and high polishing quality. High-speed, low-temperature heating precision polishing device and polishing method for diamond film with high polishing efficiency and low production cost

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