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Preparation for amorphous carbon thin-film hydrophobic material with rear surface fluorating process

A fluorination treatment, hydrophobic material technology, applied in metal material coating process, gaseous chemical plating, superimposed layer plating and other directions, can solve the problem that fluorinated amorphous carbon film cannot be directly deposited

Inactive Publication Date: 2005-05-11
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it is not possible to directly deposit fluorinated amorphous carbon films on solid surfaces that can be corroded by fluorine atmospheres (hereinafter referred to as "fluorine-fearing surfaces")

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] 1. First use one of the conventional vapor deposition methods "magnetron sputtering" to prepare a layer of amorphous carbon film on the quartz substrate with a thickness of 0.15 microns;

[0016] 2. Then put the substrate into the chemical vapor phase surface treatment chamber, vacuumize the surface treatment chamber and fill it with carbon tetrafluoride gas, the air pressure is 9500Pa;

[0017] 3. Apply a radio frequency electromagnetic field near the substrate to generate a glow discharge, and the radio frequency power density is 100W / cm 2 , the substrate temperature is 500°C, and the fluorination time is 10 minutes.

[0018] Hydrophobicity was measured on the surface treated in this example, and the static contact angle with distilled water was 120°.

Embodiment 2

[0020] 1. First use one of the conventional vapor deposition methods "plasma assisted hot wire method" to prepare a layer of amorphous carbon film on the single crystal silicon substrate with a thickness of 2.85 microns;

[0021] 2. Then put the substrate into the chemical vapor phase surface treatment chamber, vacuumize the surface treatment chamber and introduce tetrafluoroethylene, and keep the air pressure at 1.5Pa;

[0022] 3. Apply a radio frequency electromagnetic field on the substrate to generate glow discharge, and the radio frequency power density is 2.2W / cm 2 , the substrate temperature is 0°C, and the fluorination time is 120 minutes.

[0023] Hydrophobicity was measured on the surface treated in this example, and the static contact angle with distilled water was 125°.

Embodiment 3

[0025] 1. First use the "magnetron sputtering method" to prepare a layer of amorphous carbon film on the glass substrate with a thickness of 1.65 microns;

[0026] 2. Then put the substrate into the chemical vapor phase surface treatment chamber, vacuumize the surface treatment chamber and introduce carbon tetrafluoride gas, and keep the air pressure at 3000Pa;

[0027] 3. Apply a radio frequency electromagnetic field near the substrate to generate a glow discharge, and the radio frequency power density is 30W / cm 2 , the substrate temperature is 300°C, and the fluorination time is 60 minutes.

[0028] Hydrophobicity was measured on the surface treated in this example, and the static contact angle with distilled water was 145°.

[0029] No corrosion was found in the substrates of the above examples through microscopic observation, and the contact angle was over 120°.

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Abstract

This invention relates to preparation of hydrophobic amorphous carbon film material with F-treated substrate. It comprises: depositing an amorphous 0.1-3um film on a F corrosive surface as substrate was deposited by a normal vapour deposition process; putting it into a chemical gas phase surface treatment chamber, vacuuming the chamber and filling F-C gases at 1-10000Pa, providing a electromagnetic field of 2-100W / cm2 to make gases glow discharging, F-treating the substrate at 0-500deg.C for 10-120min. No corrosion is found on the substrate in the experiment and the angle of contact was over 120deg.

Description

technical field [0001] The invention relates to a method for preparing a hydrophobic film material, which is suitable for treating the surface of a solid that needs to be hydrophobic. Background technique [0002] The technique of making solid surfaces hydrophobic has a wide range of applications in many industrial fields, such as automotive, construction, optics, etc. In the past, people's attention has been mainly focused on organic materials, especially fluorine-containing organics. However, organic materials have some shortcomings that are difficult to overcome, such as low hardness, poor wear resistance, and low heat resistance temperature. In recent years, some researchers have begun to try to use inorganic materials to achieve hydrophobicity, mainly using amorphous carbon films. Amorphous carbon is characterized by high hardness and wear resistance, and can withstand higher temperatures. [0003] In order to further improve the hydrophobicity of amorphous carbon fi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35C23C16/22C23C16/505C23C28/04
Inventor 王波严辉朱满康汪浩侯育冬宋雪梅
Owner BEIJING UNIV OF TECH
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