Polishing composition and polishing method
A composition and compound technology, applied in the directions of polishing compositions containing abrasives, surface etching compositions, chemical instruments and methods, etc.
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[0010] Embodiments of the present invention will be described below.
[0011] Silicon wafers used as semiconductor substrates are manufactured by sequentially applying polishing, etching and edge polishing to wafers cut from silicon single crystal ingots. Generally, in order to process the surface of the silicon wafer into a mirror surface, the silicon wafer is subjected to a chemical mechanical polishing (CMP) process which combines chemical polishing and mechanical polishing.
[0012] In order to improve the polishing efficiency and the surface quality of the polished silicon wafer, the polishing of the silicon wafer usually includes a pre-polishing step of pre-polishing the surface of the silicon wafer and a processing polishing step of processing and polishing the pre-polished silicon wafer surface. In the pre-polishing step, high polishing efficiency is mainly required. In the processing and polishing step, the surface quality of the polished silicon wafer is mainly requ...
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