Capacity coupling atmosphere glow-discharge plasma generator

A glow discharge and plasma technology, applied in the field of plasma physics and chemistry, can solve problems such as poor stability, small plasma scale, and unevenness, and achieve improved stability, improved uniformity and stability, and increased discharge power. Effect

Inactive Publication Date: 2005-12-14
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a capacitively coupled atmospheric pressure glow discharge plasma generating device, whic

Method used

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  • Capacity coupling atmosphere glow-discharge plasma generator
  • Capacity coupling atmosphere glow-discharge plasma generator
  • Capacity coupling atmosphere glow-discharge plasma generator

Examples

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Example Embodiment

[0016] Example 1

[0017] Such as figure 1 As shown, power frequency 50Hz high voltage power supply 1, output voltage 0-15kV, power 500W; matching network 2, used to adjust the matching between the power supply and generator, stabilize and control discharge; coupling capacitor 3, value 30pF,; plasma The generator 4 contains static atmospheric air; the high-voltage electrode 5 is a resistive single-needle copper electrode with a resistance of 10 megaohms; the low-voltage electrode 6 is a resistive single-needle copper electrode with a resistance of 10 megaohms. The electrode spacing is 2mm. Static air at atmospheric pressure is used as the discharge medium. Discharge occurs when the voltage increases to 5kV. figure 2 Is the atmospheric pressure glow discharge voltage-current waveform. At this time, the applied voltage is 6.3kV. In the current waveform, the first large spike is caused by the charging and discharging of the coupling capacitor in the circuit, even when there is no p...

Example Embodiment

[0018] Example 2

[0019] Such as figure 1 As shown, high-frequency power supply 1, operating frequency 10kHz, output voltage 0-20kV, power 1kW; matching network 2; coupling capacitor 3, value 30pF; plasma generator 4, which is static atmospheric pressure air; high voltage electrode 5, which is resistance The resistance value of the single-needle copper electrode is 0.25 megaohm; the low-voltage electrode 6 is a resistive single-needle copper electrode with a resistance value of 0.25 megaohm. Figure 4 It is the corona discharge image when the external voltage is 5.4kV, the power frequency is 10kHz, and the electrode spacing is 2mm; Figure 5 It is the glow discharge image when the applied voltage is increased to 6.3kV; Figure 6 It is the glow discharge image when the applied voltage is increased to 7.8kV.

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Abstract

The present invention relates to one kind of capacitor coupled atmospheric pressure glow discharge plasma generator, and features that the plasma generator consists of power supply, electrodes with serially connected coupling capacitor or with serially connected coupling capacitor, resistor and inductor, matching network between the power supply and the electrodes to stabilize and control discharge, and work medium between electrodes. Under the action of power supply, the work medium between electrodes discharges and under the regulation of the matching network and the coupling elements, atmospheric pressure glow discharge plasma is generated. The present invention is used in plasma physics and chemistry, such as material processing and preparation, harmful gas purification, ozone generator and other fields.

Description

technical field [0001] The invention belongs to the technical field of low-temperature plasma physics and chemistry, and in particular relates to a capacitively coupled atmospheric pressure glow discharge plasma generating device. Background technique [0002] Non-equilibrium plasma, also known as low-temperature plasma or cold plasma, is a partially ionized gas composed of particles such as electrons, ions, active particles, molecules and free radicals. Among them, the electron temperature is very high (the energy is about 10ev), and the ion temperature is close to normal temperature. In the non-equilibrium plasma state, many chemical reactions that usually cannot occur or require extremely harsh conditions can occur at normal temperature and pressure and without catalysts. Non-equilibrium plasma has been widely used in electrostatic dust removal, ozone generator, harmful gas purification, water treatment, material surface treatment, sterilization and disinfection and othe...

Claims

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Application Information

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IPC IPC(8): H05H1/24
Inventor 马腾才张禹涛任春生齐兵王达望尹美强王坤
Owner DALIAN UNIV OF TECH
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