The invention relates to a
silicon carbide linear temperature sensor, a temperature measuring method thereof and a manufacturing method thereof and belongs to the technical field of
semiconductor devices. The
silicon carbide linear temperature sensor comprises a P well at the top layer of a
silicon carbide N-epitaxial layer, an N well with a shallower central
junction depth at the top of the P well, an N-type
silicon carbide ohmic contact region at the center of the N well, an
Ohmic contact electrode at the upper surface of the N-type
silicon carbide ohmic contact region, N-type Schottky contact electrodes at two ends of the N well and a
passivation layer at the surface of a device. According to the
silicon carbide linear temperature sensor, the temperature measuring method and the manufacturing method, a lateral design is adopted to obtain the silicon carbide temperature sensor based on double
Schottky diode structures, on one hand, the influence of reverse
saturation current on the
linearity of the sensor can be eliminated, the
linearity is improved, on the other hand, a linear dependence relation between
diffusion resistance Rs and temperature is introduced, and the sensitivityof the device is improved. At the same time, the device structure provided by the invention is a lateral structure, compared with an existing longitudinal structure, the structure of the invention iseasy to integrate, due to the
isolation effect of the P well, the
crosstalk between sensor main devices can be reduced, and the feasibility of integration with N-type epitaxial power devices is increased.