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Manufacturing method of stamper master disc to produce optical recording medium

The technology of an optical recording medium and its manufacturing method is applied in the fields of optical recording carrier manufacturing, recording/reproducing by optical method, optical recording carrier, etc., and can solve the problems such as the deterioration of the reproduced waveform graph, so as to reduce the difference and improve the invariance of the reproduced signal. Effects of increasing symmetry and suppressing differences in characteristics

Inactive Publication Date: 2006-01-04
SONY CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, there arises a problem of deterioration of motion due to increased asymmetry of the reproduced waveform

Method used

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  • Manufacturing method of stamper master disc to produce optical recording medium
  • Manufacturing method of stamper master disc to produce optical recording medium
  • Manufacturing method of stamper master disc to produce optical recording medium

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Experimental program
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Embodiment Construction

[0057] Embodiments of the present invention are described in detail below with reference to the accompanying drawings, and the present invention is not limited to the following embodiments.

[0058] The outline of the production process of the manufacturing method for the master disc used to produce the optical recording medium will refer to Figures 6A to 6D The process diagram is described.

[0059] like Figure 6A As shown, first, the substrate 2 of the master disk 1 made of a suitable material that is difficult to charge by electron beam irradiation described later, such as a silicon semiconductor substrate, is prepared. Then, a resist layer 3 exposed by an electron beam is coated and formed on the substrate 2 by an appropriate method such as spin coating.

[0060] Chemically amplified positive resists may be suitable for use as this resist layer 3.

[0061] Next, when the focused electron beam is being modulated in response to the recording signal, the focused electron...

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Abstract

When a stamper master disc 1 to produce an optical recording medium is manufactured, the concavities and convexities corresponding to the pits of a finally obtained optical recording medium are formed by recording compensation exposure pulses of a plurality of exposure pulses symmetrical to the center of the longitudinal direction of the pit. Thus, in the optical recording medium, a pit width difference produced by a difference of the pit lengths can be decreased.

Description

technical field [0001] The present invention relates to a method of manufacturing a stamper master for producing optical recording media. Background technique [0002] in the attached picture figure 1 is a schematic plan view of an optical recording medium, such as a CD-ROM (Compact Disc Read Only Memory) optical recording medium. like figure 1 As shown, in this optical recording medium, concave and convex patterns such as track grooves and information pits are formed on the surface of the substrate of the optical disc or on the surface of the resin layer formed on the surface of the substrate. [0003] The concave and convex patterns are formed by using a stamper having a pattern opposite to the target concave-convex pattern as a mold stamper to mold the recording medium substrate by an injection molding process, or as a mold stamper. A press stamper in a so-called 2P (photopolymerization) method to press a resin coated on a recording medium substrate, that is, a suitabl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B7/26G03F7/20B29C59/02B29L17/00G11B7/24G11B9/00
CPCG11B7/261
Inventor 古木基裕
Owner SONY CORP