Manufacturing method of stamper master disc to produce optical recording medium
The technology of an optical recording medium and its manufacturing method is applied in the fields of optical recording carrier manufacturing, recording/reproducing by optical method, optical recording carrier, etc., and can solve the problems such as the deterioration of the reproduced waveform graph, so as to reduce the difference and improve the invariance of the reproduced signal. Effects of increasing symmetry and suppressing differences in characteristics
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[0057] Embodiments of the present invention are described in detail below with reference to the accompanying drawings, and the present invention is not limited to the following embodiments.
[0058] The outline of the production process of the manufacturing method for the master disc used to produce the optical recording medium will refer to Figures 6A to 6D The process diagram is described.
[0059] like Figure 6A As shown, first, the substrate 2 of the master disk 1 made of a suitable material that is difficult to charge by electron beam irradiation described later, such as a silicon semiconductor substrate, is prepared. Then, a resist layer 3 exposed by an electron beam is coated and formed on the substrate 2 by an appropriate method such as spin coating.
[0060] Chemically amplified positive resists may be suitable for use as this resist layer 3.
[0061] Next, when the focused electron beam is being modulated in response to the recording signal, the focused electron...
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Abstract
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