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Centrifugal sintering system

A technology of sintering device and centrifugal force field, applied in the field of centrifugal sintering device, can solve problems such as difficulty and small deflection allowable value

Active Publication Date: 2006-02-08
NAT INST OF ADVANCED IND SCI & TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The rotating shaft of the above-mentioned sintering device is used in a high-temperature environment, so even if it is desired to use a ceramic shaft, since the ceramic material is a brittle material, the rotation speed of the rotating shaft increases beyond its bending critical speed, which is the same as the case of the rigid shaft method. The deflection tolerance on the material is small, so it is more difficult
For this reason, there is a problem in this method that the rotation speed of the rotating shaft is limited below the bending critical speed

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0091] (1) Induction heating test of conductive ceramics

[0092] In the present invention, induction heating is used to heat the object to be heated by using the rotor or the member of the sample holder as a conductive material to generate heat by itself. In this case, the components of the rotor or the sample holder are required to have light weight, high strength, high thermal conductivity, etc. in addition to high electrical conductivity. Therefore, in this example, silicon carbide was selected as a material that satisfies these conditions, and tests were conducted on the heating and temperature rise characteristics of various silicon carbide ceramic members.

[0093] (2) Physical properties of test samples

[0094] As test samples, three types having greatly different electrical conductivity were prepared (Table 4). In particular, sample A is the low-resistance material with the highest conductivity, and sample C is the high-resistance material with the lowest conductiv...

Embodiment 2

[0102] This is a centrifugal sintering device in which the rotor and shaft are made of silicon carbide ceramics having the same dimensions as the samples made of silicon nitride shown in Table 4. Using this centrifugal sintering device, the temperature of the heating environment is 1200°C at a rotation speed of 30,000 min. -1 rotate. As a result, no rotational vibration due to thermal deformation occurred, and it was confirmed that high-speed operation could be performed smoothly. In addition, it was verified that the rotation speed from the rotation speed near the resonance is 32,000min -1 Vibrations began to occur, as predicted.

[0103] Sample title

Embodiment 3

[0105] In this example, a rotor with a built-in sample holder made of conductive silicon carbide ceramics (the same material as sample A shown in Example 1) for high-temperature and high-speed rotation, and a rotor made of silicon nitride ceramics for the shaft were used. Centrifugal sintering device. The dimensions of the rotor and shaft are the same as those made of silicon nitride shown in Table 3. In this device, one side rotates at 30,000min -1While rotating the rotor, use the induction heating coil of the induction heating device with a maximum output power of 30kW and a frequency of 70kHz to selectively heat only the rotor itself, and indirectly heat the sample mounted on the sample holder at 800°C / hr Heating rate to 1200°C and keeping it warm for 2 hours. As a result, the sample holder and the sample were indirectly heated to 1200°C. As a result of continuous operation for 3 hours, it can be confirmed that it can operate smoothly. Figure 9 Shown is a diagram showi...

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Abstract

The present invention provides a rotor, a shaft and a sample holder for a centrifugal sintering system. More particularly, the present invention relates to a ceramic member for a centrifugal sintering system which is a member consisting of a rotor, a shaft and a sample holder for use in a centrifugal sintering system imparting a centrifugal force field and a temperature field to a molded body of ceramics or metal powder or a ceramic precursor film wherein the rotor for turning the sample holder, the shaft and the sample holder are composed of ceramics. In a particular embodiment of the ceramic member, the rotor which turns the sample holder is composed of conductive silicon carbide ceramics and the rotor alone is selectively caused to self heat by induction heating means to indirectly heat the sample. In a further embodiment of the ceramic member, the sample holder is composed of a material with a large dielectric loss and the sample holder alone is selectively heated using dielectric heating means to indirectly heat the sample.

Description

technical field [0001] The present invention relates to a centrifugal sintering device for obtaining a ceramic or metal sintered body or a ceramic film by drying and / or sintering a molded body or a ceramic precursor film composed of ceramic or metal powder in a centrifugal field. By rotating the sample table at a high speed, the molded body or ceramic precursor film composed of ceramic or metal powder can generate centrifugal force, and at the same time, by drying and / or sintering them, a dense sintered body of ceramic or metal, or a dense A ceramic member for a centrifugal sintering device of a ceramic membrane, and a centrifugal sintering device equipped with the ceramic member. The present invention contributes to the provision of a rotor, a rotating shaft and a sample holder for rotating the sample holder at high temperature and high speed for use in a centrifugal sintering device. Background technique [0002] Generally, as a device for generating centrifugal force, a ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22F3/06C04B35/64B22F3/00C04B35/10C04B35/48C04B35/575F27B17/00H01L21/687
CPCH01L21/68757C04B35/584C04B2235/66C04B35/597C04B35/575B22F3/003C04B35/48B22F2003/1042H01L21/68792C04B2235/668C04B2235/77C04B2235/9607C04B2235/96C04B35/64F27B17/0025C04B35/10B22F3/06F27B17/00
Inventor 渡利广司杵鞭义明内村胜次石黑裕之森光英树
Owner NAT INST OF ADVANCED IND SCI & TECH