High-accuracy self-adaptation driving power for ultrasonic transducer

Abstract

Disclosed a high-accurate self-adapting ultrasonic energy converter driving power, comprises a processing circuit based on DSP, a multi-path high-speed / DA converter circuit, a multi-path high-speed A / D converter circuit, a digital-analogue phase-lock loop, a accumulator circuit, a high-accurate broad band voltage-controlled oscillator circuit, a phase detector circuit, a power amplifier circuit, a output current detecting circuit, a micro-current detecting circuit, a output voltage detecting circuit, and a interface circuit. The invention has the ability to control program with self-adapting servo-algorism, which can trace the working condition of energy converter in time, and process the feedback information to compensate and modify the energy of ultrasonic energy converter, which can meet the energy converters with different types without changing parameters of hardware, to realize best condition of transformation efficiency of ultrasonic energy converter.

Description

technical field [0001] The invention relates to an ultrasonic transducer drive power supply. Background technique [0002] In wire bonding equipment, ultrasonic bonding is the most basic and common method. The energy of the ultrasonic wave is converted into mechanical energy through the transducer, that is, the ultrasonic energy is applied to the piezoelectric ceramic chip of the transducer to vibrate, and is transmitted to the rivet vertically installed on the top of the horn through the horn, so that the tip generates Mechanical vibration of a certain amplitude. This mechanical energy promotes the formation of a clean interface between the two metals under its action and the mutual diffusion and welding together. In wire bonding equipment, this principle is used to bond metal leads such as gold, aluminum or copper wires to the pad metal layer. [0003] In the above process, in addition to the quality factor of the transducer itself, the conversion efficiency of ultrason...

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Problems solved by technology

[0003] In the above process, in addition to the quality factor of the transducer itself, the conversion efficiency of ultrasonic energy into mechanical energy through the transducer is the key technology that determines whether the welding can be successful, and the bandwidth of the resonant frequency of the ultrasonic transducer is It is very narrow, and the peak point of the bandwidth and resonance will also drift within a certain range due to various mechanical installation and load factors. These factors will directly lead to a decrease in the energy conversion efficiency of the transducer, and the welding task cannot be completed.

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