Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Heat measuring type micro flow sensor

A flow sensor and miniature technology, used in the measurement of flow/mass flow, measurement device, liquid/fluid solid measurement, etc., can solve the problems of expanding the application range, reducing the strength of the sensor and the ability to resist pressure and impact, and achieve enhanced The effect of anti-corrosion and anti-wear ability, increasing the scope of use and reducing energy consumption

Inactive Publication Date: 2006-06-14
ZHEJIANG UNIV
View PDF0 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the suspended structure improves the thermal insulation performance between the sensing element and the substrate while reducing the strength of the sensor and the ability to withstand compression and impact, this type of sensor is suitable for working in micropipes with diameters of millimeters and submillimeters , the scope of application needs to be expanded

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Heat measuring type micro flow sensor
  • Heat measuring type micro flow sensor
  • Heat measuring type micro flow sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 3

[0044] For Example 3, the substrate is replaced by the silicon dioxide heat insulating film 8 in Example 1 with a single crystal silicon substrate 9 containing silica gel filler 10 to achieve heat insulation effect. In this structure, the monocrystalline silicon substrate 9 forms a film structure above the silica gel filler 10, and this film structure belongs to the monocrystalline silicon substrate, but when the sensor is working, it plays a role similar to that of the monocrystalline silicon film in embodiment 1. Same insulation effect.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses heat measuring type micro flow sensor. It is set silicon dioxide adiabatic membrane, single crystal silicon film formed by heating element and thermoelectric pile semiconductor electrode, silicon dioxide insulating layer, thermoelectric pile metal electrode, metal tie-line and soldered dot, and silicon nitride film from down to up at single crystal silicon substrate. Or it is filled silica gel filler, or set thermoelectric pile semiconductor electrode and heating element at the middle. The thermoelectric pile semiconductor electrode is set silicon dioxide insulating layer, thermoelectric pile semiconductor electrode, metal tie-line and soldered dot, and silicon nitride film from down to up. The sensor is set at the flow passage. The heating element is supplied power to generate heat quantity. The thermoelectric pile is outputted the pressure signal to realize heat measuring type flow measurement.

Description

technical field [0001] The invention relates to fluid metering equipment, in particular to a heat measuring micro flow sensor. Background technique [0002] With the development of science and technology, the miniaturization of sensors has brought fast response time, low power consumption and the possibility of accurate measurement of small flow, which can meet the requirements of precise measurement of small flow in chemical industry, medical treatment, environmental detection, gas metering and other fields. flow requirements. Among them, the thermal flow sensor has a simple mechanical structure and circuit structure, and is currently the research hotspot of the micro flow sensor. [0003] Commonly used thermal flow sensors are mainly divided into two working modes: anemometer and calorimeter. Compared with the anemometer, the sensor working in thermal mode has good response characteristics to small flow velocity, and can judge the flow direction, which is more suitable f...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/68G01F1/69
Inventor 傅新谢海波杨华勇段萱苡
Owner ZHEJIANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com