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Focusing device for laser ablation microarea analysis

A technology of micro-area analysis and laser ablation, which is applied in the direction of material analysis, measuring devices, and analysis materials through optical means, to achieve high optical power, high focusing precision, and good directionality

Active Publication Date: 2006-08-09
NCS TESTING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] 2) Suitable for samples with flat surface, not suitable for samples with uneven surface

Method used

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  • Focusing device for laser ablation microarea analysis
  • Focusing device for laser ablation microarea analysis
  • Focusing device for laser ablation microarea analysis

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Embodiment Construction

[0024] Further details will be given below in conjunction with the accompanying drawings.

[0025] attached by figure 1 It can be seen that the present invention includes a laser triangulation system, a signal acquisition and processing system, and a sample movement positioning system.

[0026] The laser triangulation measurement system is composed of a semiconductor laser 1, a transmitting lens 2, a receiving lens 4, and a CCD sensor 5. The light emitted by the semiconductor laser 1 is converged by the transmitting lens 2 and irradiates the surface of the analyzed sample 3, and is reflected by the analyzed sample 3. The light is focused on the CCD sensor 5 through the receiving lens 4 . Its ranging principle is:

[0027] After the semiconductor laser 1 is converged, it irradiates on the point O of the reference plane (hereinafter referred to as the object light spot), and is imaged at the 5 photoelectric center O' point of the CCD sensor through the receiving lens group 4 (...

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Abstract

The focusing device is composed of laser triangular surveying system, signal acquisition and process system, and sample movable positioning system. Laser triangular surveying principle is adopted in the invention. Semiconductor laser is as light emission source. CCD sensor is as component of receiving light. Analyzing processed triangular surveying result obtains relative position between sample to be analyzed and laser focusing lens in use for ablation. Moreover, the said relative position is compared with required focusing position. Using the compared result controls step motor to drive sample worktable so as to achieve automatic accurate focusing on surface of sample to be analyzed for laser in use for ablation.

Description

technical field [0001] The device provides a simple and accurate focusing device for laser ablation micro-area analysis, and mainly relates to the field of material composition analysis. Background technique [0002] In recent decades, laser ablation has been more and more widely used in the field of material composition analysis, and has been widely used in mining and metallurgy, geology, archaeology, environment, chemical industry, biomedicine and other fields. The analysis object can be micro-selected area of ​​solid phase sample and particle sample, gas phase and liquid phase sample, conductor, non-conductor or high temperature melting sample can also be analyzed, the sample does not need pretreatment or only simple treatment, the spatial resolution is within ~10um, the detection limit is in the ppt level. [0003] In laser ablation microanalysis, the laser can be directly used as the analytical instrument of the sample atom / ionization source, such as LA-OES / MS, etc., o...

Claims

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Application Information

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IPC IPC(8): G02B27/40G02B27/00G01N21/00
Inventor 姚宁娟陈吉文杨志军沈学静王海舟
Owner NCS TESTING TECH