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Gas sensor based on nanometer line array and its prepn process

A technology of gas sensor and nanowire array, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of difficult mass production and low production efficiency, and achieve the effect of high sensitivity and convenient industrial mass production

Inactive Publication Date: 2006-10-18
FUJIAN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in actual production, the main method of installing nanowires at both ends of the conductive electrode is: using an atomic force microscope to manipulate nanowires or randomly disperse nanowires. The production efficiency of these methods is very low, and it is difficult to achieve industrialized mass production.

Method used

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  • Gas sensor based on nanometer line array and its prepn process
  • Gas sensor based on nanometer line array and its prepn process

Examples

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Embodiment 1

[0029] Including an insulating substrate (4); a lower electrode layer (3) arranged on the insulating substrate; a sensing conductor (2) nanowire array connected to the lower electrode layer (3); an upper end connected to the upper end of the nanowire array Electrode layer (1). Wherein: the insulating substrate is quartz; the material of the lower electrode layer is silver thin film, the nano wire is tin oxide nano wire, and the material of the upper electrode layer is silver thin film.

[0030] 1. Preparation of the lower electrode layer

[0031] A silver film is deposited on a quartz substrate by magnetron sputtering, the thickness of the film is 90-100 nanometers, the target material of sputtering is silver, the sputtering power is 100 watts, and the sputtering pressure is 0.9 Pa.

[0032] 2. Preparation of porous alumina template

[0033] Utilize magnetron sputtering to deposit metal aluminum on the surface that is deposited with silver film to form aluminum film, the thi...

Embodiment 2

[0041] Including an insulating substrate (4); a lower electrode layer (3) arranged on the insulating substrate; a sensing conductor (2) nanowire array connected to the lower electrode layer (3); and an upper end of the nanowire array (2) connected to the upper electrode layer (1). Wherein: the insulating substrate is quartz; the material of the lower electrode layer is silver film, the nanowire is copper oxide nanowire, and the material of the upper electrode layer is tin-doped indium oxide.

[0042] 1. Preparation of the lower electrode layer

[0043] A silver film is deposited on a quartz substrate by magnetron sputtering, the thickness of the film is about 100-115 nm, the target material of the sputtering is silver, the sputtering power is 100 watts, and the sputtering pressure is 0.9 Pa.

[0044] 2. Preparation of porous alumina template

[0045] Magnetron sputtering is used to deposit an aluminum film on the silver film. The thickness of the aluminum film is 10 microns....

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Abstract

The present invention relates to gas sensor with nanometer line array for detecting gas. The gas sensor includes insulating substrate, lower electrode layer, sensing conductor, and upper electrode layer; and features that the sensing conductor across between the lower electrode layer and the upper electrode layer is nanometer line array of metal or metal oxide nanometer lines with 30-800 nm diameter, micron level length and 25-550 nm intervals. The preparation process includes the steps of: preparing lower electrode layer, preparing porous alumina template, preparing nanometer line array, preparing upper electrode layer, and etching to eliminate the porous alumina template. The present invention adopts micron-nanometer processing technology to prepare gas sensor of nanometer line array and high gas detecting sensitivity.

Description

technical field [0001] The invention relates to a gas sensor and a preparation method thereof, in particular to a gas sensor for realizing gas detection based on a nanowire array. Background technique [0002] Gas sensors are used to detect specific components in gases, and are used to detect toxic and harmful gases, provide safety alarms for flammable and explosive gases, and detect, analyze and research gases to be understood. There are two main types of gas sensors currently used in industrial production. One is a gas sensor based on semiconductor oxide materials; the other is a gas sensor based on electrochemical principles. Kong et al. reported a chemical gas sensor made of single-walled carbon nanotubes for the detection of NO at room temperature. 2 and NH 3 and other gases [Science 287,622 (2000)], people such as Favier use palladium metal nanowire arrays arranged horizontally to connect to two silver electrode wires to construct hydrogen sensors and switches [Scie...

Claims

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Application Information

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IPC IPC(8): G01N27/12G01N27/407
Inventor 赖发春黄志高蔡声镇陈水源吕晶张志城
Owner FUJIAN NORMAL UNIV
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