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Method for preparing chromium oxide composite coating

A composite coating and chromium oxide technology, which is applied in the preparation of corrosion-resistant composite coatings, low friction, and high wear resistance, can solve the problem of difficult control of the proportion of metal elements, high friction coefficient of hard coatings, and poor bonding strength And other problems, to achieve the effect of reducing the friction coefficient, improving wear resistance, and reducing the friction coefficient

Inactive Publication Date: 2006-10-25
UNIV OF SCI & TECH BEIJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The invention mainly solves the problems of high friction coefficient, poor bonding strength and poor corrosion resistance of traditional hard coatings, and solves the problem that the ratio of each metal element of the multi-metal element composite coating is difficult to control

Method used

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  • Method for preparing chromium oxide composite coating
  • Method for preparing chromium oxide composite coating
  • Method for preparing chromium oxide composite coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Treat the surface of the 45# steel substrate to a certain roughness, ultrasonically clean it in alcohol for 5 minutes, then wash it with deionized water, put it into a vacuum chamber after drying, the distance between the 45# steel substrate and the target is 60mm, and the target is Chromium with a purity of 99.99%, evacuated to 5.2×10 -5 Pa. The working gas during the sputtering process is high-purity argon with a flow rate of 10cm 3 / min, the working air pressure is 1.4×10 -1 Pa. Bombard the surface of the substrate with 50W input power for 15min in an argon atmosphere to remove the oxide layer and other impurities on the surface. Change the power to 350W, remove the baffle above the target, sputter chromium metal for 5 minutes as a transition layer, then turn on the oxygen flow meter and start to feed oxygen, the oxygen flow rate is 2.6cm 3 / min, sputtering 10min; change sputtering power to 300W, oxygen flow rate to 2.9cm 3 / min, sputtering 20min; change sputter...

Embodiment 2

[0025] Treat the surface of the high-speed steel substrate to a certain roughness, ultrasonically clean it in alcohol for 5 minutes, then wash it with deionized water, dry it and put it in a vacuum chamber. The distance between the high-speed steel substrate and the target is 60mm, and the target is 99.99% pure. % Cr, evacuated to 1.0 x 10 -4 Pa. The working gas in the sputtering process is high-purity argon, and the flow rate is 15cm 3 / min, the working air pressure is 5.4×10 -2 Pa. Bombard with 100W input power for 5min in argon atmosphere to remove the oxide layer and other impurities on the surface. Change the power to 250W, remove the baffle above the target, sputter chromium metal for 10 minutes as a transition layer, then turn on the oxygen flow meter and start to feed oxygen, the oxygen flow rate is 2.6cm 3 / min, sputtering 10min; change sputtering power to 220W, oxygen flow rate to 2.9cm 3 / min, sputtering 20min; change the sputtering power to 190W, oxygen flow t...

Embodiment 3

[0028] Treat the surface of the high-speed steel substrate to a certain roughness, ultrasonically clean it in alcohol for 5 minutes, then wash it with deionized water, dry it and put it in a vacuum chamber. The distance between the high-speed steel substrate and the target is 60mm, and the target is 99.99% pure. % Cr, evacuated to 6.2 x 10 -5 Pa. During the sputtering process, the working gas is high-purity argon, and the flow rate is 20cm 3 / min, the working air pressure is 4.3×10 -2 Pa. Bombard with 80W incident power for 10min in argon atmosphere to remove the oxide layer and other impurities on the surface. Change the power to 300W, remove the baffle above the target, sputter chromium metal for 10 minutes as a transition layer, then turn on the oxygen flow meter and start to feed oxygen, the oxygen flow rate is 2.6cm 3 / min, sputtering 10min; change sputtering power to 260W, oxygen flow rate to 2.9cm 3 / min, sputtering 20min; change sputtering power to 220W, oxygen fl...

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Abstract

The producing process of the chrome oxidation compounding layer relates to the producing the hard layer. The invention mainly solves the problem of the high rubbing quotiety of the traditional hard layer, the bad felting intension, the bad causticity-resisting and the difficult controlling the proportion of the tantalum on the excessive tantalum compounding layer. adopting the nonbalance shooting frequent action magnetism controlling spattering system and the chrome with the stronger causticity-resisting and the higher rigidity, the single chrome metal is used to produce the compounding layer, when producing, the shooting chrome metal is used for the transitional layer, the oxygen is added, the oxygen flux and spatter shooting power are adjusted unceasingly; when the oxygen flux reaches to the tiptop, the direct current negative deflection voltage is turn on. The rubbing quotiety of the layer provided by the invention is low, the milling-resisting is high and the causticity-resisting is well. The process is easy, all material is ordinary and the industrial production can be realized.

Description

technical field [0001] The invention relates to the preparation of hard coatings, in particular to the preparation of low-friction, high wear-resistant and corrosion-resistant composite coatings. Background technique [0002] There are many reasons for the rapid development of low-friction coatings. The fundamental reason is that we have to use liquid or grease lubrication in order to reduce friction. However, they will pollute the product more or less. Like the food industry we are familiar with, we have to take Reduce the friction coefficient of the equipment itself. Then there are more harsh environments, such as high temperature and vacuum. High-temperature environments are more common in the chemical industry, power stations, etc., and space technology is closely related to vacuum environments. The motivation for developing low-friction coatings is to achieve the same low-friction effect with less or no lubricating oil. Therefore, in recent years, many material scien...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/02C23C14/14C23C14/54
Inventor 高克玮庞晓露杨会生王燕斌
Owner UNIV OF SCI & TECH BEIJING
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