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Loading and unloading device and method for ultrathin plate glass grinding step

A technology of flat glass and ultra-thin glass, which is applied in the direction of machine tools suitable for grinding workpiece planes, optical surface grinders, and parts of grinding machine tools. Deformation and other problems, achieve good fluid permeability, maintain flatness, and improve efficiency

Inactive Publication Date: 2006-11-08
HENAN ANCAI HI-TECH +1
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  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

This method can realize the automatic loading and unloading of glass in theory, but the following problems are found in actual use: 1. After grinding, the slurry is dried and adsorbed at the position corresponding to the pores on the back of the glass, resulting in traces, which are not easy to remove
2. For an area of ​​1M 2 The above substrate is affected by the heat generated by the friction between the grinding disc and the glass, and the workbench will be deformed due to thermal expansion and contraction. It is not easy to ensure the flatness of the workbench surface. If there is no elastic pad as an adjustment, the substrate processing will be deformed.

Method used

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  • Loading and unloading device and method for ultrathin plate glass grinding step
  • Loading and unloading device and method for ultrathin plate glass grinding step
  • Loading and unloading device and method for ultrathin plate glass grinding step

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Embodiment Construction

[0020] Such as image 3 , 4 , 5, the present invention is used in the loading and unloading device of flat ultra-thin glass grinding process, including the workbench mechanism that has air holes on the surface and can realize vacuum adsorption and pressure air suspension for flat glass substrates, and utilizes servo motors to drive vacuum adsorption and The workbench mechanism of pressure air suspension realizes the device for loading and unloading the flat glass substrate. In the workbench mechanism of vacuum adsorption and pressure air suspension, there is a loose microporous rigid material for carrying the flat glass substrate between the workbench and the flat glass. Comes as a spacer.

[0021] as attached Figure 5 As shown, the loose microporous rigid material is made of microporous ceramics with a loose structure and good fluid permeability. The ceramic pad is fixed on the workbench, and a certain number of pores are prefabricated on the workbench, which are opened in...

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Abstract

The present invention relates to loading and unloading device and method for ultrathin plate glass grinding step. The loading and unloading device includes one bench mechanism with surface pores for vacuum adsorption and air pressure suspending of plate glass, and one servo motor mechanism for driving the bench mechanism to load or unload plate glass. The bench mechanism has cushion of rigid porous ceramic material for bearing the plate glass. The present invention can realize automatic loading and unloading of plate glass automatically in high work efficiency.

Description

Technical field: [0001] The utility model relates to a loading and unloading device and method used in the flat ultra-thin glass grinding process. The glass is adsorbed and separated by a rigid material with a microporous loose structure, and a loading and unloading position is provided to realize automatic loading and unloading of the flat glass. , it is especially recommended to be used in the field of ultra-thin glass TFT large area substrate (area greater than 1M 2 ) grinding and polishing process. technical background: [0002] In the manufacturing process of TFT liquid crystal display, in order to form a reliable semiconductor connection of the thin film used in the circuit, the flatness of the glass surface of the substrate is required to be relatively high, and the unevenness of the substrate will cause wiring breakage at the raised part. Chemical mechanical polishing (CMP) can perform very fine grinding, so that the machined surface can be highly planarized. Durin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B13/015B24B7/24B24B41/00
Inventor 贾伟李柳强王雁林李长俊陈琳璞张魁东
Owner HENAN ANCAI HI-TECH
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