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Magnetic recording apparatus

A magnetic recording and magnetic recording medium technology, applied to the recording of information on magnetic disks, pattern recording carriers, and different recording carrier forms, etc., can solve the problems of low signal-to-noise ratio of servo signals and inability to use track operations

Inactive Publication Date: 2007-01-10
KK TOSHIBA +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Turns out the signal-to-noise ratio (SNR) of the servo signal was too low to be useful for seek operations

Method used

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Examples

Experimental program
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example 1

[0044] Manufacturing has figure 1 or figure 2 The planar structure shown and Figure 4 The cross-sectional structure of discrete track media is shown.

[0045] First, fabricate the main board that serves as the pattern template for the discrete track media. A photosensitive resin is coated on the Si substrate, followed by electron beam exposure to form a latent image. The electron beam exposure apparatus used in this process includes a signal source for irradiating electron beams at a predetermined timing, and a stage for moving a substrate with high precision in synchronization with the signal source. Patterns with five track pitches (Tp) of 50nm, 120nm, 200nm, 300nm and 400nm are formed on the same main board. Raised and depressed patterns are formed by developing the latent image.

[0046] On this resist master, a Ni conductive film was formed by conventional sputtering. Next, a nickel film with a thickness of about 300 μm is electroplated on the conductive film. A ...

example 2

[0070] Produce according to the method similar to example 1 as image 3 Shown is a so-called patterned medium with a planar structure. A glass disk with a diameter of 0.85 inches was used as the substrate. The fabrication process was as follows: SOG was applied on the substrate by spin coating, the same stamp as in Example 1 was imprinted on the substrate, and then the stamp was baked to 250 degrees Celsius, thereby directly forming a pattern. Three substrates with different recess depths were fabricated by applying RIE to SOG with SF6, where the RIE time was controlled.

[0071] A perpendicular magnetic recording film is formed on the substrate by sputtering. The layer structure is as follows: substrate / FeCoTa soft magnetic underlayer (60nm) / Ta(5nm) / Ru(10nm) / CoCrPt(15nm) / C(3nm). The substrate is not heated. Carbon (C) is formed by CVD. After the media was removed from the sputter chamber, perfluoropolyether was applied to the media as a lubricant by dipping.

[0072] Th...

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Abstract

A magnetic recording apparatus has a magnetic recording media including a substrate having protrusions and recesses corresponding to a servo zone and a data zone and a magnetic layer deposited thereon, and a read / write head including a pair of magnetic shields and a giant magnetoresistive element, in which a track pitch of the media ranges 20 to 300 nm, a linear velocity of the magnetic recording media is 11 m / s, and a distance m from the magnetic shield to the magnetic layer on the protrusions of the media and a distance d between the magnetic layer on the protrusions and that on the recesses in the servo zone of the media are satisfies the condition that the value of d / m is 0.2 or more and 3 or less.

Description

technical field [0001] The present invention relates to a magnetic recording device including a substrate-treated patterned medium. Background technique [0002] Patterned media containing structures corresponding to servo signals and tracks or data bits have been studied as high-density magnetic recording media. In particular, the patterned medium is produced by a method in which the substrate is processed into the above-mentioned structure using a conventional process (hereinafter referred to as substrate processing type), and a multilayer film including a magnetic film is deposited, which has the advantage that, due to the simplicity of the process, its Additional processing costs are low. On the other hand, a patterned medium produced by depositing a multilayer film including a magnetic film on a flat substrate and processing the magnetic film by etching or the like is proposed (referred to as a magnetic layer processing type). While it is advantageous that conventiona...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/82G11B5/012
CPCB82Y10/00G11B5/82G11B5/743
Inventor 喜喜津哲樱井正敏冈正裕
Owner KK TOSHIBA