TiN/AlON nano multilayer coating for cutting tool

A nano-multi-layer and cutting tool technology, which is applied in coatings, metal material coating processes, layered products, etc., can solve the problems that cannot meet the higher requirements of coating mechanical properties, low hardness, etc.

Inactive Publication Date: 2007-03-07
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The multi-layer coating is composed of MeN layer and Al 2 o 3 Layers are deposited alternately to form a multilayer structure with periodic changes in the two components. The total thickness of the coating is 0.5-20 μm. Although the hardness of this coating is not lower than that of its constituents MeN and Al 2 o 3 The hardness of a single-layer coating, but its hardness is not high, still cannot meet the higher requirements of the modern processing and manufacturing industry for the mechanical properties of the coating

Method used

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  • TiN/AlON nano multilayer coating for cutting tool
  • TiN/AlON nano multilayer coating for cutting tool
  • TiN/AlON nano multilayer coating for cutting tool

Examples

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example 1

[0020] This embodiment consists of alternately depositing TiN layers 1 and AlON layers 2 on a metal or ceramic substrate 3 , the thickness of the TiN layer 1 is 3 nm, and the thickness of the AlON layer 2 is 0.3 nm. The total thickness of the thus obtained TiN / AlON multilayer coating is 2 μm, the ratio of N and O in the AlON layer is 0.3, and the hardness of the coating is 35 GPa.

example 2

[0022] This embodiment consists of alternately depositing TiN layers 1 and AlON layers 2 on a metal or ceramic substrate 3 . The total thickness of the TiN / AlON multilayer coating is 4 μm, the thickness of the TiN layer is 3 nm, and the thickness of the AlON layer is 0.5 nm. The ratio of N and O in the AlON layer is 0.3, and the hardness of the coating is 41 GPa.

example 3

[0024] This embodiment consists of alternately depositing TiN layers 1 and AlON layers 2 on a metal or ceramic substrate 3 . The total thickness of the TiN / AlON multilayer coating is 3 μm, the thickness of the TiN layer is 3 nm, and the thickness of the AlON layer is 0.8 nm. The ratio of N and O in the AlON layer is 0.3, and the hardness of the coating is 36 GPa.

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Abstract

The invention relates to a TiN / AlON nanometer multilayer coat used in cutter. Wherein, it is formed by alternatively depositing TiN layer and AlON layer on rigid alloy, ceramic or metal base; the thickness of TiN layer is 3-5nm while the thickness of AlON layer is 0.3-0.8nm; the total thickness of coat is 2-5 mum. The inventive coat can be obtained by using dual-target reaction splash technique of argon nitrogen mixed condition to alternatively deposit TiN layer and AlON layer on the furnished metal or ceramic base. The inventive coat has better high-temperature anti-oxidization property, and high rigidity, while the highest rigidity is 41GPa. And it can be used as the coat of high-speed cutting blade, etc.

Description

technical field [0001] The invention relates to a nanometer coating used in the technical field of cutting tools, in particular to a TiN / AlON nanometer multilayer coating used for cutting tools. Background technique [0002] High-speed cutting technology with a cutting speed of ≥100m / min and dry cutting technology with no or little use of coolant are gradually becoming the mainstream of cutting technology development due to their high processing efficiency and low environmental pollution. However, these technologies put forward higher requirements on the performance of the tool coating, that is, the coating not only needs to have high hardness, low friction coefficient and other mechanical properties, but also requires the coating to have excellent high temperature oxidation resistance. [0003] After searching the existing technical documents, it is found that US Patent US6565957, US6638571, US5766782 and Chinese Patent 95108982. 2 o 3 layer, so that it forms a multi-laye...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B33/00B32B9/00C23C16/00
Inventor 孔明李戈扬戴嘉维黄碧龙吴莹
Owner SHANGHAI JIAO TONG UNIV
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