A zinc oxide based blue LED and its manufacture method

Abstract

The ZnO-base blue diode comprises: from bottom to top, a circular substrate, a buffer layer prepared on substrate to improve material epitaxial grow quality, a n-ZnO layer with edge etched as ring stage for ring Au / Ti electrode, an i-ZnO active layer for hole-electron recombination, a p-ZnO layer to provide being injected holes; an Au / Ni layer benefit to diffusion of injected current, an Au / Ni electrode contacted with wire, and a ring Au / Ti electrode on the said stage.

Description

technical field

[0001] The invention relates to the technical field of semiconductor devices, in particular to a zinc oxide-based blue light-emitting diode and a preparation method thereof. Background technique

[0002] Zinc oxide has attracted research attention for a long time due to its applications in many scientific and industrial fields such as piezoelectric sensors, optical waveguides, acousto-optic media, conducted gas detection, transparent conductive electrodes, varistors, etc. Now it has received more attention and is considered to be very promising for application in ultraviolet optoelectronics. Compared with GaN material, ZnO material has the following relative advantages: it has ready-made single crystal material; its larger exciton binding energy (~60meV, GaN~25meV). Recent advances in quality and conductivity control of bulk materials and epitaxial films have increased interest in using this material to fabricate short-wavelength light-emitting devices and t...

Images