Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head

Abstract

This invention disclosed a measuring equipment which consists of a nanometer measuring machine and a tiny feeling gauge head. The feeling gauge head was fixed on the machine by a plank. The measuring range of scanning probe micro-technique was improved by this equipment, the range of object by other measuring means was widened; it could manage to measure some micro-geometric senses including dimension, displacement, etc. The measuring precision was improved by this equipment.

Description

technical field [0001] The invention relates to the field of micro-nano testing. In particular, it relates to a micro-geometric quantity measurement device based on a nanometer measuring machine and a micro-tactile probe, which can realize the measurement and characterization of microstructure geometric quantities including parameters such as microforce, displacement, size, and shape features. Background technique [0002] With the rapid development of micro-nano processing technology in recent years, the feature size of the device and its associated tolerances have been continuously reduced, while the complexity of its shape and structure has continued to increase, which puts forward higher requirements for the detection methods of geometric quantities in the processing process. . In the semiconductor industry, the required device detection accuracy has reached the submicron or nanometer level, and the range of detection objects has also expanded to micro devices with spec...

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Problems solved by technology

At the same time, optical methods cannot measure certain specific three-dimensional topography, such as the aperture at the edge of the object, the directionality and related dimensions of the surface of the object, etc., so it cannot achieve true three-dimensional measurement

Scanning probe technology represented by atomic force microscope and scanning tunneling microscope uses microscopic effects to detect and control the magnitude of microcurrent and microforce on the tip of the sample and the surface of the sample, and scan the surface of the sample to obtain the morphology and surface characteristics of the sample. Level resolution, but it is easily disturbed by the measurement environment, and thus has a greater impact on the measurement results. At the same time, the measurement range of scanning probe microscopy is only a few tens of microns, which greatly limits the samples for microstructure measurement. In addition, special structures such as microstructures with large aspect ratios cannot be measured

Coordinate measurement technology is to use the traditional coordinate measuring machine as the measurement platform, combined with trigger or analog probe to detect the workpiece under test, but the detection accuracy of traditional coordinate measurement technology can only reach microns or hundreds of nanometers, which can no longer satisfy Measurement requirements for rapid development of micro-nanofabrication technology

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